• 12:55 – 13:15

Accelerating MEMS Product Validation and Commercialization with IME ScAlN MEMS Platform

There is strong interest in PiezoMEMS due to its unique piezoelectric effect property that enables precise control of mechanical motion, actuation, and sensing at the microscale, potential for miniaturization and integration, and their applicability across a wide range of applications.

However, piezoMEMS commercialization faces several challenges such as manufacturing scalability, integration challenges, reliability and rigorous testing and market adoption.

Addressing these challenges requires a collaborative effort among research institutions, MEMS manufacturers and industrial players to invest in research and development, materials and process characterization & optimization and reliability testing to drive a successful commercialization of PiezoMEMS devices. The 1st of its kind “Lab in the Fab” concept by Institute of Microelectronics (IME), ST Microelectronics and ULVAC, focusing on Piezo MEMS technology aims to accelerate and ease the transition from POC to volume production with the development of PiezoMEMS platforms.

IME ScAlN MEMS platforms integrates advanced modelling, simulation, and design tools with a comprehensive MEMS process building blocks, to enable faster prototyping and optimization of MEMS devices. These ScAlN MEMS platforms with distinct features will be showcased with examples of devices implementation for various applications, and are now available for application in MEMS-based products like speaker, PMUT, RF filter, etc.

Watch on ISES TV > PPTs in ISES Docs >
Angeline Tee photo

Angeline Tee

Deputy Director Business Development

A*Star IME

Angeline Tee has over 25 years of international experience in the Semiconductor and MEMS industry. Currently serving as the Business Development Deputy Director at IME, ASTAR, Angeline actively engages with industry leaders and identifies business development opportunities to create and capture value for industry partners and contribute to Singapore’s economy.

Angeline has earned an Honor’s degree in Bachelor of Applied Science (Materials Engineering) and a Master of Science (MSc) in Electrical Engineering from the National University of Singapore (NUS). Furthermore, she holds a Master of Business Administration (MBA) from the University of Birmingham, which adds a strategic and managerial perspective to her skill set.

Her career in MEMS began at EG&G Heimann Optoelectronics, where she successfully commercialized the MEMS accelerometer for automotive airbag applications. Throughout her professional journey, Angeline has gained extensive experience in various areas, including research and development, process engineering, marketing, and business development. She has worked with both small start-up companies and large corporations, accumulating a wealth of knowledge and expertise in the field. Angeline’s technical proficiency in MEMS technology led her to assume the role of product marketing manager at GLOBALFOUNDRIES where she spearheaded the business development of GLOBALFOUNDRIES’s newly setup MEMS BU in 2010. Subsequently, she joined XFAB in Germany, and played a pivotal role in China regional marketing, supporting the sales team in market expansion.

With her diverse skill set, extensive industry experience and strong academic background, Angeline hopes to contribute significantly to both technological advancement and innovation creation in the MEMS industry.

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Established in 1991, the Institute of Microelectronics (IME) is a research institute under Singapore’s Agency for Science, Technology and Research (A*STAR). In IME, we focus on delivering high impact research and development for the global semiconductor industry. IME’s role is to collaboratively develop and innovate next-generation technologies to enable a dynamic semiconductor ecosystem. Together with our highly skilled talent pool, we develop strategic capabilities and innovative technologies through state-of-the-art infrastructure. IME’s core research areas are in Advanced Packaging, piezoMEMS, SiC, mmWave GaN, and photonics & sensors. We will continue to shape the semiconductor industry’s roadmap for many years to come.

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