9-11 December 2025
Muscat, Oman
11:00 – 11:10
Advancing Packaging Technology: Exploring Through Glass Vias for Glass Core Integration as an Alternative to Si Interposer
In contemporary electronic packaging, the pursuit of miniaturization, enhanced performance, and reliability remains a fundamental driving force. This abstract introduces a novel approach in advanced packaging through the utilization of Through Glass Vias (TGVs) for Glass Core Integration, as a viable alternative to Conventional Silicon (Si) Interposer technology. The presentation encapsulates the background, motivations, technical aspects, and results of our evaluation work in this innovative packaging paradigm.
The background of this research is grounded in the growing demand for smaller form factors, increased functionality, and improved thermal management in electronic devices. Traditional Si interposer technology, while effective, presents limitations in terms of scalability, thermal conductivity, and electrical performance. Thus, the exploration of alternative materials and methodologies is imperative for the next generation of packaging solutions.
Motivated by the exceptional properties of glass, including its thermal stability, electrical insulation, and compatibility with existing manufacturing processes, this study delves into the feasibility of utilizing glass as both a carrier and core material in advanced packaging. Through Glass Vias (TGVs) emerge as a key enabler, facilitating vertical interconnects within the glass substrate.
Key considerations such as through-hole requirements, aspect ratios, seed layer deposition, and adhesion to glass are meticulously addressed to ensure the integrity and reliability of the packaging structure. Innovative process technologies are developed to fabricate TGVs with precise dimensions, high aspect ratios, and robust electrical properties.
The hardware requirements for implementing TGV-based packaging are evaluated, encompassing equipment for laser drilling, seed layer deposition, plating, and planarization processes. Cost considerations are also examined to ascertain the economic viability of this approach compared to conventional methodologies.
Results from our evaluation work demonstrate promising advancements in TGV-based packaging, including enhanced electrical performance, superior thermal dissipation, and significant miniaturization potential. Through detailed analysis and experimentation, this presentation illuminates the transformative capabilities of Through Glass Vias for Glass Core Integration, heralding a new era in advanced packaging technology.

Herbert Oetzlinger
Lam Research Corporation
Herbert Oetzlinger , graduated HTL Braunau 1987 in high power electronics/ electrotechnics.
Herbert worked in the Semiconductor industry for 30+ years, focused on wet processing .
Special focus on advanced packaging in electroplating and wet etching/cleaning of wafers and substrates. For many years he was VP of Sales with Semitool Inc, where he excelled with his in-depth knowledge of process and hardware. During this time, Herbert worked with many worldwide leading companies on Fan-out, E-WLB and other new developments in wafer level advanced packaging.
In 2012, he founded Semsysco GmbH and is also heading the company as CEO.
LAM – Semsysco is a world leader in high speed electrochemical deposition with a pedigree and expertise in all-around wet processing for wafer and panel level.
Lam Research Corporation
Company Profile
Lam Research Corporation is a trusted global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. Our strong values-based culture fuels our progress, and it’s through collaboration, precision, and delivery that we are driving semiconductor breakthroughs that define the next generation. Lam Research (Nasdaq: LRCX) is a FORTUNE 500® company headquartered in Fremont, California, with operations around the globe. Learn more at www.lamresearch.com
Company Products & Services
We combine superior systems engineering, technology leadership, and a commitment to customer success to advance the global semiconductor industry. Our broad portfolio of market-leading deposition, etch, strip, and wafer cleaning solutions helps customers achieve success on the wafer by enabling device features that are 1,000 times smaller than a grain of sand—it’s why nearly every chip today is built with Lam technology.
