• 15:55 – 16:10

Challenges to enabling the transition from organic to glass core substrates as RDL approaches 2 µm l/s and beyond

For many years organic substates have provided the most cost effective solution to enable the heterogeneous integration of chiplets. However, as the substrate interconnect density increases, there has been a paradigm shift in the package architecture to replace organic substrates with glass core substrates. This talk will discuss the benefits and challenges of both architectures and explores the possibility of extending the useful life of organic substrates beyond 5 µm l/s.

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Keith Best

Director, Product Marketing, Lithography

Onto Innovation

For more than 35 years, Keith Best has held a range of semiconductor processing and applications positions for both device manufacturing and capital equipment companies, of which 13 years were with ASML where he held the position of Director, Applications Engineering. Most recently, Keith was Advanced Packaging Process Development Engineering Manager at SkyWater Florida. He is currently the Director of Product Marketing, Lithography, at Onto Innovation supporting the JetStep® advanced packaging lithography stepper. Keith holds a B.Sc. Honors Degree in Materials Science from the University of Greenwich, UK. He has numerous publications and holds 22 US patents in the areas of photolithography and process integration.

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Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; elemental layer composition; overlay metrology; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization.

General Telephone: +1 978 253 6200
General email: info@ontoinnovation.com
Website: www.ontoinnovation.com

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