• 16:20 – 16:25

EVATEC – Mastering Deposition Technologies from Core to Package

While deposition of Advanced Functional Materials remains at the core of building up MEMS devices, their combination and integration has become key for gaining traction in today’s applications.

From active piezoelectric sensing or actuating elements to heat dissipation layers, antireflective coatings, EMI shielding or stress compensation – the ultimate challenge is the Integration of Various Technologies into one device or package. Expertise in Material Science and Integration Technologies is what the market expects. Supporting manufacturers with a variety of deposition technologies such as PVD, PECVD and PEALD alongside clever tool concepts (batch, single wafer or inline), our customers benefit from EVATEC’s wide range of Know-How in Semiconductors, Optoelectronics, Advanced Packaging and Photonics.

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Maurus Tschirky photo

Maurus Tschirky

Senior Strategic Marketing Manager


Maurus Tschirky is Senior Strategic Marketing Manager at Evatec. He is globally responsible for the market segment MEMS in terms of strategy and strategic project and customer acquisition. His genuine interest in advanced functional materials with piezoelectric and magnetic properties emphasize his dedication to the MEMS and Sensors market in particular. Maurus had a number of positions in the PVD-equipment industry (Balzers, Unaxis, Oerlikon and now Evatec) ranging from Application Engineer, System Engineer, Project Manager to Product Manager over the years and also spent 3 years leading a research section at CSEM in Neuchatel, Switzerland. He has a first Degree in Control Electronics from the University of Applied Sciences in Buchs, followed by a Masters in Business Engineering / International Marketing from the Hochschule für Wirtschaft und Technik in Zurich, Switzerland.

Evatec delivers complete thin film deposition solutions in Advanced Packaging, Semiconductor, Optoelectronics and Photonics – from UBM /RDL processes in FOWLP and FOPLP applications, to deposition of high performance piezoelectrics like AlScN for 5G networks or NIR bandpass filters for 3D sensing, face and gesture recognition in our smart devices. We deliver tailored production solutions with batch, cluster or inline architecture according to your substrate format, throughput, process and fab integration requirements. Evatec’s Advanced Process Control (APC) technologies set new standards in deposition through ‘in situ” capability for control of film properties during the deposition cycle. Reduce your process development times, enhance repeatability and yields or increase tool throughput.

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