• 13:55 – 14:15

Going Vertical With MEMS: Unfolding System-Level Development Of Scanning Micromirror Technologies

Being a top European research center for electronic based systems, Silicon Austria Labs (SAL) offers cooperative research in the pioneering areas of Microsystems, Sensor Systems, Intelligent Wireless Systems, Power Electronics and Embedded Systems. SAL connects key industrial and scientific players for the appli­ca­tion-oriented re­search along the value chain. It accelerates the processes from idea to innovation within the major market tendencies on the global arena.

In his presentation, Dr. Mohssen Moridi, Head of Research Division Microsystems, will discuss the system-level development of scanning micromirror technologies with focus on MEMS-based vertical integration, from initial concept to applied demonstrator. Metasurfaces, passivation coating, embedded AI algorithms and ASIC integration will be outlined as added functionalities.

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Dr. Mohssen Moridi photo

Dr. Mohssen Moridi

Head of Research Division Microsystems

Silicon Austria Labs (SAL)

Mohssen Moridi received the master’s and Ph.D. degrees in microtechnology from École Polytechnique Fédérale de Lausanne (EPFL) in Switzerland. After finishing his PhD he had several research positions in Switzerland. In 2016 he moved to Austria as a head of Microsystem division at CTR AG to establish a MEMS department and to manage a new cleanroom dedicated to industrial R&D. Since 2019 he is a part of Silicon Austria Labs and recently became the Head of Research Division Microsystems. He is currently managing more than 40 researchers with the focus on Thin Film Technologies, Integrated Photonics, Magnetic and Piezoelectric Microsystems. Mohssen has more than 20 years of experience in development of MEMS devices.

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Silicon Austria Labs (SAL) has been founded to be a top Euro­pean re­search center for elec­tronic-based systems. In the network of science and economy, we carry out re­search at a global level and create the basis of ground­breaking prod­ucts and processes.

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