16:35 – 16:45
Enabling Solutions for GaN Power Device Fabrication
Advanced power semiconductors and PMICs are key enabling technologies in automotive, consumer and wireless communications.
Third generation, wide bandgap semiconductors have already emerged as enabling materials for the fabrication of advanced power devices. GaN, for example, has huge potential both in discrete high electron mobility transistors (HEMTs) and monolithically integrated PMICs. However, GaN device fabrication poses some unique challenges, including ultra-low damage processing to improve device performance and reliability.
In this presentation, Lam will provide some examples of how we are partnering with our customers and research partners to continually innovate in this field, to offer market leading etch, deposition and clean solutions for advanced GaN power device manufacturing.
Annika Peter
Lam Research Corporation
Annika joined Lam Research in 2017 and is currently Senior Technology Manager responsible for the Specialty Technologies application space. She previously held positions in engineering and program management, where she was partnering with our customers to enable future device generations. Holding her first fully processed device wafer in 2007, Annika received a B.Eng. in Mechatronics and Microsystems in 2008 and an M.Sc. in Applied Physics in 2011. During her engineering thesis at Siemens AG, she worked on a high-speed laser scanning microscope for waver and bump inspection. In 2009 Annika joined a research group at the Institute of Micro Technologies, developing waveguides with integrated optics for bio-sensing, including hardware and process development for RF-sputtering, holographic lithography, and reactive ion etching. Prior to joining Lam Research Annika was part of the Technology Group at Oxford Instruments Plasma Technology, where she led multiple equipment and process developments in the field of atomic scale processing.
Lam Research Corporation
Company Profile
Lam Research Corporation is a trusted global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. Our strong values-based culture fuels our progress, and it’s through collaboration, precision, and delivery that we are driving semiconductor breakthroughs that define the next generation. Lam Research (Nasdaq: LRCX) is a FORTUNE 500® company headquartered in Fremont, California, with operations around the globe. Learn more at www.lamresearch.com
Company Products & Services
We combine superior systems engineering, technology leadership, and a commitment to customer success to advance the global semiconductor industry. Our broad portfolio of market-leading deposition, etch, strip, and wafer cleaning solutions helps customers achieve success on the wafer by enabling device features that are 1,000 times smaller than a grain of sand—it’s why nearly every chip today is built with Lam technology.
