27-28 August 2025
Suwon
11:40 – 12:00
Monolithic CMOS-MEMS Foundry Convergence: Unlocking the Future of Piezoelectric Sensors and Emerging Technologies
The convergence of monolithic CMOS and MEMS foundries is paving the way for the next generation of sensor technologies, particularly in the realm of piezoelectric devices. This integration allows for the seamless coupling of advanced semiconductor fabrication with MEMS structures, enabling ultra-compact, high-performance piezoelectric sensors. The emergence of chiplet-based architectures further enhances design flexibility, reducing costs, and accelerating time-to-market. This presentation will explore how this convergence supports the development of cutting-edge technologies, ranging from advanced wearables to medical devices, and its implications for the future of sensor-driven applications across industries.
Eloi Marigo, Ph.D.
SilTerra
ELOI MARIGO was born in Barcelona, Spain, in 1985. He received the degree in Engineer Telecommunications, a Master in Micro and Nanoelectronics and a Ph.D. degree in electrical engineering from Universitat Autònoma de Barcelona, Bellaterra, Spain, in 2008, 2009 and 2012 respectively. In 2013, he joined the Department of Technology Development, Silterra Malaysia Sdn. Bhd., as a Senior Engineer, and in 2024 he became a Senior Manager. His current research interests include the design, simulation, fabrication and characterization of monolithic CMOS-MEMS with special focus on piezoelectric devices.
SilTerra
Company Profile
SilTerra, a pure-play wafer foundry, offers various CMOS technologies from 180nm to 110nm nodes. It serves a wide range of end-market applications, including IoT, power management, consumer electronics, medical and communication products. Besides CMOS technologies, SilTerra also provides MEMS foundry services, unique and patented MEMS-on-CMOS technologies, silicon photonics, bio-photonics, and power. Its excellent customer service team helps customers realize working prototypes from proof of concept to high volume manufacturing.