• 11:25 – 11:45

Piezoelectric MEMS Platform for Sensing and RF Applications

In the field of MEMS (Micro-Electro-Mechanical Systems), material innovation drives MEMS process platform development. Over the past decade, MEMS has experienced remarkable growth and the commercialization of RF MEMS devices, primarily due to advancements in AlN/ScAlN film processes. Therefore, to effectively translate innovations in piezoelectric materials into the development of piezoelectric MEMS devices, it is essential to establish a Piezoelectric MEMS process platform capable of implementing the optimized stack and structure required for specific applications. IME is actively developing in the development of Piezoelectric MEMS process platforms and would like to share our progress. In this presentation, we introduce IME’s MEMS platforms and their associated applications:1. Back cavity platform for ultrasonic ranging and imaging2. Piezoelectric Silicon-on-Nothing platform for dense PMUT array (e.g. microfluidics)3. Thin-film ScAlN platform for RF ME

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Dr. Yul Koh photo

Dr. Yul Koh

Senior Scientist

A*Star IME

Graduated from the Department of Electrical and Electronic Engineering at Seoul National University in Korea. Following graduation, he embarked on a journey of research at LG Electronics Sensor Solution Lab, where he focused on the developing of MEMS sensor platform and its application in products. Afterward, he assumed his current position at the Institute of Microelectronics in Singapore, where he delved deep into research at the acoustic MEMS device. His expertise spans a wide spectrum, from MEMS devices to sensor solutions, acquired through 15 years of experience in the field. He is currently engaged in various research and development initiatives in the field of piezoelectric micromachined ultrasound transducers and low-power MEMS switches.

Established in 1991, the Institute of Microelectronics (IME) is a research institute under Singapore’s Agency for Science, Technology and Research (A*STAR). In IME, we focus on delivering high impact research and development for the global semiconductor industry. IME’s role is to collaboratively develop and innovate next-generation technologies to enable a dynamic semiconductor ecosystem. Together with our highly skilled talent pool, we develop strategic capabilities and innovative technologies through state-of-the-art infrastructure. IME’s core research areas are in Advanced Packaging, piezoMEMS, SiC, mmWave GaN, and photonics & sensors. We will continue to shape the semiconductor industry’s roadmap for many years to come.

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