• 11:30 – 11:50

SITRI – MEMS Sensor and SiPh R&D Pilot Line Platform

Bo Cui

Senior Director of Research

Shanghai Industrial Technology Research Institute (SITRI)

Dr. Bo Cui is currently the senior director of research at SITRI (Shanghai Industrial micro-Technology Research Institute). He received his BS from Peking University in 1994, and his PhD from Princeton University in 2003. After PhD, he joined the National Research Council of Canada in 2003, and then Department of Electrical and Computer Engineering, University of Waterloo (Canada). He was a visiting researcher to SITRI in 2022, and joined SITRI in January 2024. His research focuses on the development of cleanroom MEMS/micro-nano-fabrication technologies. He is the author for 125 journal publications and 130 conference publications/presentations.

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Shanghai Micro-Technology Industrial Research Institute (SITRI) was established in 2013 by Shanghai Science and Technology Commission, Jiading District Government and Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. It is a R&D and transformation functional platform integrating R&D, engineering, industrialization and cultivation, providing in-depth process technology support and services for innovative enterprises and partners. SITRI was established under the guidance of Shanghai Lianhe Investment Co., Ltd.’s strategic mission of serving the national strategy and being a pioneer in scientific and technological development. It relies on the “three-in-one” innovation architecture model of Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. With the support of the technical strength of Shanghai Institute of Microsystem and the investment and operation model of Shanghai Xinwei Technology Group, it has established close cooperative relations with many domestic and foreign production, learning and research organizations, realized the efficient industrialization of innovative achievements, and accelerated the establishment of the “More than Moore” industrial ecosystem.

· SITRI has the first 8-inch “More than Moore” R&D pilot line in China, providing “More than Moore” core process technologies such as MEMS, silicon photonics, and biochips, and providing efficient R&D, pilot and verification services for semiconductor companies such as design, equipment and materials, realizing seamless connection from R&D to small batch production.

· Up to now, SITRI has applied for 877 patents, 697 invention patents, including 56 PCT (international patent) patents. · SITRI is based in Shanghai, facing the Yangtze River Delta, and radiating across the country, and has initially formed an industrial ecosystem in the field of “More Than Moore”.

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