• 16:55 – 17:05

Technology Pushes Limits – How New Plating Solutions Enable the Semiconductor Devices of Tomorrow

In our digital-driven society the increasing importance of information, automation and hence data processing requires the next generation of faster and smaller semiconductor devices. Metallization processes play a crucial role in enabling the newest interconnects and are hence of high importance for further technological advances. Requirements such as reliability, functionality and downsizing are thus common targets of semiconductor devices as well as plating processes.

We will present some of MKS Atotech’s new solutions for advanced packaging, such as Cu-to-Cu direct bonding as well as new processes for SnAg solder bump plating. Additionally, we will give insights into our offerings for highly reliable Si- and SiC-based Power Semiconductors.

Dr. Christian Ohde photo

Dr. Christian Ohde

Global Product Director SC/FEC

mks Atotech

Christian finished his PhD in chemistry and joined MKS Atotech in 2010. After holding various management positions, he was appointed Head of R&D in 2013 for the company’s electrolytic copper plating activities, mainly focusing on plating of various metals in different equipment tool sets (horizontal and vertical).

Christian Ohde is leading MKS Atotech’s global Semiconductor and Functional Electronics Coatings activities. He is a reputable industry expert and thought-leader in this field.

Atotech, a brand within the Materials Solutions Division of MKS Instruments, develops leading process and manufacturing technologies for advanced surface modification, electroless and electrolytic plating, and surface finishing. Applying a comprehensive systems-and-solutions approach, Atotech’s portfolio includes chemistry, equipment, software, and services for innovative and high-technology applications. These solutions are used in a wide variety of end-markets, including datacenter, consumer electronics and communications infrastructure, as well as in numerous industrial and consumer applications such as automotive, heavy machinery, and household appliances. With its well-established innovative strength and industry-leading global TechCenter network, MKS delivers pioneering solutions through its Atotech brand – combined with unparalleled on-site support for customers worldwide. For more information about Atotech, please visit us at atotech.com

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