09:30 – 10:30
Time to Collaborate. SubFAB Research and Development.
Workshop by International SubFAB Research Labs Initiative (ISRL)
One of the key areas poised to become a showstopper for the industry’s ability to achieve sustainability goals is commonly called SubFAB. Existing infrastructure can’t support true game changing development of environmentally friendly and affordable solutions to match the manufacturing technologies advancement cadence.
International SubFAB Research Labs (ISRL) initiative will enable an industry-wide collaborative effort. Member companies will gain access to a dedicated facility with a complete infrastructure required to operate a set of 300mm process tools to enable a science based research focusing on reliability issues, technology validation, pathfinding, materials handling and reclaim.
Ilya Zabelinsky
International SubFAB Research Labs Initiative (ISRL)
Ilya Zabelinsky is a globally recognized technical leader with nearly 30 years of experience in vacuum and gas abatement applications for semiconductor manufacturing. Ilya joined Intel in 1996, contributing to the startup and commissioning of Israel’s first 200mm FAB. He emerged as an operational and technical leader across Intel SubFABs worldwide.
In 2022, Ilya embarked on a mission to “bring Science to SubFAB” and founded the International SubFAB Research Labs. Ilya holds a B.Sc. in Chemical Engineering and possesses broad knowledge and vast practical experience in semiconductor manufacturing processes, FAB equipment, central facilities, and infrastructure.
International SubFAB Research Labs Initiative (ISRL)
Company Profile
International SubFAB Research Labs (ISRL) is a privately owned company founded by highly experienced and skilled team of semiconductor industry veterans.
ISRL’s vision is to fill the immense gap between industry’s desire for sustainable manufacturing and its ability to effectively address fundamental efficiency issues associated with handling, abatement and reclaim of hazardous process material waste streams. In other words – all is SubFAB.
ISRL is a first of kind facility with complete infrastructure required to operate a l fleet of 300mm process tools with versatile setup of deposition and dry etching process chambers, in high volume manufacturing-like conditions, to enable a wide range of sustainability research and development projects.
Company Products & Services
We are ENABLERS.
Our facility will enable OTHERS to help semiconductor operations work more sustainably with sharing of best practices leading to a fast and highly efficient deployment of sustainability improvements with a business model enabling clients to both reduce their costs and amplify sustainability benefits, faster time to market for breakthroughs, innovations and operational excellence in sustainable semiconductor manufacturing.
We are opening new horizons in research by understanding the significant environmental challenges that have been historically overlooked by the commercial pressures of value-generating semiconductors fabrication.
Our facility will offer a unique opportunity for companies looking to validate and qualify their equipment and technologies aimed at environmental sustainability.
We will simulate HVM-like conditions to support R&D for next generation gas abatement, materials recycle/reclaim, energy efficiency and other critical segments to enable sustainable semiconductor manufacturing in decades to come.
