• 07:55 – 08:25

Registration

Enhancing Europe’s Leadership in MEMS & Sensors

  • 08:30 – 08:50

Keynote

Enhancing Europe’s Leadership in MEMS & Sensors: Seizing Opportunities with the EU Chips Act

(Virtual Presentation)

MEMS sensors and actuators bridge the natural and virtual worlds, unlocking the potential of digital technologies across key industries like automotive, manufacturing, and healthcare. This sector is thriving, showing consistent growth, with Europe leading the charge through its advanced companies and world-class research institutions. Strengthening Europe’s presence in this sector is crucial for maintaining its leadership in the digital revolution. The European Commission is dedicated to sustaining this growth and enhancing Europe’s position in the field, recognizing the strategic importance of the MEMS sector. The EU Chips Act is designed to support this by addressing challenges across the entire semiconductor value chain, benefiting the MEMS sector through enhanced collaboration, research, and funding. This legislation aims to create a more resilient and innovative ecosystem for European MEMS manufacturers and developers. In this keynote, we will provide an overview of the EU Chips Act, highlighting the vast opportunities it offers, including access to world-leading research and innovation platforms, as well as various funding opportunities tailored for the MEMS sector.

Pierre Chastanet

Head of Unit of “Microelectronics and Photonics Industry” Unit, DG CNECT

EU Commission

Pierre Chastanet is Head of the Unit for Microelectronics and Photonics Industry at the European Commission, where he manages the development of European semiconductor policy and the implementation of the European Chips Act.

Mr. Chastanet has been working for over 17 years in the European Commission, supervising different digital policies in the areas of cloud, data flows, software, cybersecurity, privacy, green ICT, and telecom innovation.

Prior to that, Mr. Chastanet gained more than 10 years of ICT experience, mostly in various IT management positions in a large multinational company.

He graduated from Telecom ParisTech, the Free University of Brussels, and the London School of Economics and Political Science. He also earned a Leadership Executive Certificate from Harvard Kennedy School of Government.

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The European Commission is the EU’s politically independent executive arm. The Directorate‑General for Communications Networks, Content and Technology is the Commission department responsible to develop a digital single market to generate smart, sustainable and inclusive growth in Europe.

Follow the latest EU tech news on Twitter, Facebook, Instagram and YouTube via @DigitalEU.

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  • 08:55 – 09:15

Keynote

MEMS inertial sensors for navigation applications

Northrop Grumman LITEF started the development of micro-electromechanical systems (MEMS) gyroscope chips with Deep Reactive Ion Etching (DRIE) in 2003. Based on this technology, a six degree of freedom MEMS IMU was developed for navigation applications. After successful transfer from early MEMS IMU prototypes to series production, NG LITEFs IMU is available since many years with a specified bias error of 4 deg/h and an angular random walk (ARW) of 0.15 deg/sqrt(h) over temperature. Recently an European Technical Standard Order (ETSO) for the MEMS based Attitude Heading Reference System (AHRS) LCR-350B was received, so that NG LITEF is able to supply the first purely MEMS based AHRS worldwide to the avionic helicopter and fixed-wing market. Next generation avionic systems require even higher performing MEMS sensors. Northrop Grumman LITEF is addressing these needs with the next generation MEMS sensors.

Stefan Rombach

Head of MEMS

Northrop Grumman LITEF GmbH

Stefan Rombach received the Phd. degree in microsystems engineering from the University of Freiburg, Freiburg, Germany. He was working as a member of the scientific staff at the chair of microelectronics in the field of readout interfaces for MEMS inertial sensors and MEMS micro-mirrors based on low-power system design and Delta-Sigma modulation. Since 2018, he has been with Northrop Grumman LITEF, Freiburg, Germany, where he is working as Head of the MEMS department in the field of inertial sensor systems development.

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LITEF is one of the leading companies in the development and manufacturing of navigation and sensor systems. The company’s expertise is based on German technology for mechanical, fibre optic and micromechanical inertial sensors. This enables ITAR-free distribution of LITEF products around the globe.
Founded in 1961 and headquartered in Freiburg im Breisgau (Germany), the company’s product range includes MEMS sensors based inertial measurement units, attitude and heading reference systems, inertial navigation systems and inertial reference systems. In close dialogue with the customer, specific product solutions are developed for measurement and navigation tasks with maximum precision and reliability requirements.

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RF MEMS

  • 09:20 – 09:40

Disruptive MEMS Power Technology – The Ideal Switch for Power applications

Electromechanical Relays have been around since the 1800s, and the architecture we still see today is not drastically different than what was introduced 200 years ago. These relays tend to be very large, slow, and unreliable. The invention of transistor in semiconductor era helped to address some of those issues but they also come with big losses and inefficiencies that create significant waste heat and thermal challenges. Menlo Micro’s Ideal Switch is a revolutionary and disruptive technology that combines the benefits of electromechanical relays and solid-state switches,
offering unparallel performance, reliability, and efficiency. Developed through years of R&D which started by GE Research Lab, the Ideal Switch features a unique metal to metal contact design actuated by an electrostatic voltage on the gate electrode which forces it to close. And when we release that voltage, it opens the relay so that you have a full air gap or a zero-leakage
path for when the switch is open. In the end, it’s all about making things smaller, more powerful, and cramming more capability. Menlo Micro’s unique Ideal Switch technology provides significant energy savings, longer battery life, and lower total cost
of ownership.

Yalcin Bulut

COO

Menlo Microsystems Inc.

Yalcin has over twenty-five years of semiconductor experience, as the Chief Operating Officer, he manages sales, marketing, quality assurance and product areas at Menlo Microsystems.

Yalcin joins Menlo Micro after serving the role of Vice President of Sales and Marketing at United Silicon Carbide (UnitedSiC, now Qorvo). Prior to that his leadership experience included Vishay, Inc. where he was the Vice President of Power Product Lines, along with Alpha and Omega Semiconductor where he guided the company’s strategic direction as Vice President of Discrete Product Lines.

Yalcin holds a Bachelor of Material Science Engineering (Solid State Physics emphasis), and subsequently earned his Master of Business at Iowa State University.

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Menlo Microsystems is on a mission to create a more energy efficient and sustainable world with an entirely new category of electronic switches. The Ideal Switch® eliminates compromises and tradeoffs by combining the benefits of electromechanical and solid-state switches into the best of both worlds. Menlo Microsystems is bringing more than 99 percent reductions in size, weight, power and cost to dozens of industries such as medical, aerospace and defense, telecommunications, consumer electronics, industrial IoT (Internet of Things) and test and measurement.

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New MEMS Materials

  • 09:45 – 09:55

Piezoelectric MEMS Acoustic Transducers at Silicon Austria Labs: technology platforms and emerging applications

As a top European research center for Electronic Based Systems, Silicon Austria Labs´mission is to accelerate technological growth from idea to innovation within the major market tendencies on the global arena. The Microsystems Research Division develops cuttingedge MEMS technologies, from design and proofofconcept to product prototypes, connecting key industrial and scientific players along the value chain. In her presentation, Dr Annalisa De Pastina, Senior Scientist in PiezoMEMS Microsystem Technologies, will describe the latest technology platforms for acoustic piezoMEMS development. The talk will focus on MEMS microphones and Piezoelectric Micromachined Ultrasonic Transducers, and will discuss emerging technologies and challenges related to design, fabrication and material development.

Dr. Annalisa De Pastina

Senior Scientist in Piezoelectric Microsystem Technologies

Silicon Austria Labs (SAL)

Dr. Annalisa De Pastina is an expert in M/NEMS and piezoelectric transduction. She has 10 years of experience in the field of nanomechanical sensors and actuators, specializing in microtechnology and piezoelectric thin films. In 2014, she graduated in Biomedical Engineering from Sapienza University of Rome, Italy, and in 2018 she obtained her PhD in Microengineering from EPFL, Switzerland. Dr. De Pastina is currently a senior scientist in piezoMEMS at Silicon Austria Labs, where she leads pivotal industrial collaborations and international projects focused on the development of novel piezoelectric MEMS sensors and actuators, such as MEMS microspeakers, microphones and ultrasonic transducers.

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Silicon Austria Labs (SAL) has been founded to be a top Euro­pean re­search center for elec­tronic-based systems. In the network of science and economy, we carry out re­search at a global level and create the basis of ground­breaking prod­ucts and processes.

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  • 10:00 – 11:00

Networking Break, Coffee and Business Meetings

MEMS & Sensors Development Outside Europe

  • 11:05 – 11:25

Vibration sensors with AI for in industry applications

With the capability of predictability on equipment health by sensors which may benefits to customers’ manufacturing line with saving cost, capacity maximization, and reducing risk of manufacturing stop. Vibration sensors are widely adopted in different equipment such as lathe, milling machine, ball-screw, and motor to gather their vibration data. By the help of supervised AI machine learning model, we are able to analyze these vibration data and then to classify them to predetermined causes. The noise of vibration sensor is strongly affecting the resolution of sensor and the classification resolution of machine learning model.

In the past decade, we have launched few qualified vibration sensors with both low-noise and wide bandwidth to Taiwan market for applications in industry. Almost each Industrial vibration sensing AI solution is with different features which forces the collaboration between sensor supplier, system integration provider, and user becoming must so as to short the development lead time.

Yu-Wen Hsu photo

Dr. Jacob Hsu

CTO of Smart Sensing & Systems Technology Center

Industrial Technology Research Institute (ITRI)

Yu-Wen Hsu received the Ph.D. degrees in electrical engineering from National Taiwan University, Taipei, ROC. He is currently the Chief Technology Officer responsible for developing MEMS devices and applications with smart sensing system center, industrial technology research institute, Taiwan.

He received gold medal for national innovation and creative award in 2014 and hold 31 patents in MEMS and sensors. His current research interests are in the novel navigation-grade IMU for INS, high speed MEMS voltage/current sensors for UPS/power module, multi-gases sensor with self-healing for e-nose.

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ITRI is a world-leading applied technology research institute with more than 6,000 outstanding employees. Its mission is to drive industrial development, create economic value, and enhance social well-being through technology R&D. Founded in 1973, it pioneered in IC development and started to nurture new tech ventures and deliver its R&D results to industries. ITRI has set up and incubated companies such as TSMC, UMC, Taiwan Mask Corp., Epistar Corp., Mirle Automation.

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  • 11:30 – 11:50

SITRI – MEMS Sensor and SiPh R&D Pilot Line Platform

Weining Li

Senior Vice President

Shanghai Industrial Technology Research Institute (SITRI)

Li Weining graduated from Shanghai Jiao Tong University in 1990 with a bachelor’s degree in applied physics and a master’s degree in electronic materials and devices. He has more than 20 international invention patents and has worked in internationally renowned semiconductor manufacturing companies for more than 30 years. He was the technical director of FAB7 at Singapore Chartered Semiconductor (GlobalFoundries), responsible for the process integration and yield improvement of 40-nanometer high-speed logic chips, and played an important role in the most challenging technology node at the time. Mr. Li Weining has extensive experience in device research and development, process integration and yield management for large-scale mass production.

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Shanghai Micro-Technology Industrial Research Institute (SITRI) was established in 2013 by Shanghai Science and Technology Commission, Jiading District Government and Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. It is a R&D and transformation functional platform integrating R&D, engineering, industrialization and cultivation, providing in-depth process technology support and services for innovative enterprises and partners. SITRI was established under the guidance of Shanghai Lianhe Investment Co., Ltd.’s strategic mission of serving the national strategy and being a pioneer in scientific and technological development. It relies on the “three-in-one” innovation architecture model of Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. With the support of the technical strength of Shanghai Institute of Microsystem and the investment and operation model of Shanghai Xinwei Technology Group, it has established close cooperative relations with many domestic and foreign production, learning and research organizations, realized the efficient industrialization of innovative achievements, and accelerated the establishment of the “More than Moore” industrial ecosystem.

· SITRI has the first 8-inch “More than Moore” R&D pilot line in China, providing “More than Moore” core process technologies such as MEMS, silicon photonics, and biochips, and providing efficient R&D, pilot and verification services for semiconductor companies such as design, equipment and materials, realizing seamless connection from R&D to small batch production.

· Up to now, SITRI has applied for 877 patents, 697 invention patents, including 56 PCT (international patent) patents. · SITRI is based in Shanghai, facing the Yangtze River Delta, and radiating across the country, and has initially formed an industrial ecosystem in the field of “More Than Moore”.

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MEMS and Sensors Market Outlook

  • 11:55 – 12:15

Exploring the latest and future MEMS trends

Pierre-Marie Visse

Senior Technology & Market Analyst, MEMS & Sensing

Yole Group

Pierre-Marie Visse is Senior Technology & Market Analyst, MEMS & Sensing at Yole Group. He is working within the Photonics & Sensing team. Pierre-Marie contributes daily to the technical, marketing, and strategic analysis on various MEMS and sensing technologies.Prior to Yole Group, Pierre-Marie served as an R&D project manager at eLichens, specializing in the detection of environmental gases, for more than 2 years. His primary focus was the development of gas sensors and IoT for gas detection. Previously, Pierre-Marie worked at TDK-Tronics for more than ten years as an inertial MEMS designer for custom sensors, accelerometers, and gyroscopes. He then worked as an R&D project manager for the navigation, industrial, and watchmaking industries. Pierre-Marie graduated from ESIEE-Engineering (France) in 2010, specializing in microsystems.

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Yole Développement (Yole) has grown to become a group of companies providing marketing, technology and strategy consulting, corporate finance services, reverse engineering and costing services. With a strong focus on emerging applications using silicon and/or micro manufacturing, Yole Group of Companies has expanded to include more than 80 collaborators worldwide covering MEMS and image sensors, Compound Semiconductors, RF Electronics, Solid-state lighting, Displays, Software, Optoelectronics, Microfluidics & Medical, Advanced Packaging, Manufacturing, Nanomaterials, Power Electronics, Batteries & Energy Management and Memory. Yole, along with its partners System Plus Consulting, PISEO and Blumorpho, support industrial companies, investors and R&D organizations worldwide to help them understand markets and follow technology trends to grow their business.

More information on www.yole.fr.
Follow Yole on LinkedIn and Twitter.

Company website: www.yole.fr
www.i-micronews.com
Company phone: +33 472 83 01 80

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  • 12:20 – 13:20

Lunch

  • 13:25 – 13:45

Smart tires : powerful sensors for modern mobility

  • Smart tires are becoming relevant actors in modern mobility applications thanks to the technology maturity they have reached.

Their sensing capabilities are exploited while vehicles are circulating, generating broad data sets from the interaction of tires with roads.

Through data processing and sector specific know-how, sophisticated algorithms provide unique insights towards safety, performance, sustainability and servitization.

The paper will highlight the technical and ecosystem challenges that must still be faced to ensure the widest adoption, offering some concrete examples of deployed applications in different business environments.

Corrado Rocca

R&D Head, Cyber Unit

Pirelli

During his career, Corrado held several managerial roles in telco, media, IoT, communications and automotive industries, mainly in technical, product and business areas.

He is currently heading in Pirelli Tyre the R&D department developing tyre connectivity solutions, for OE and aftermarket applications. He is leading for Pirelli several international standardization initiatives in the field of future mobility.

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Established in Milan in 1872, Pirelli is a major player in the tyre industry and the only global manufacturer focused solely on the Consumer tyre market, which includes tyres for cars, motorcycles and bicycles. With a distinctive positioning in High Value tyres, the Group stands as a global brand known for its cutting-edge technology, high-end production excellence and passion for innovation that draws heavily on its Italian roots.
With 18 production plants in 12 countries, around 31,000 employees, a turnover of about €6.65 billion in 2023, Pirelli has a commercial presence in over 160 countries.
Pirelli’s technological excellence is also nourished by the innovation and competencies derived from sporting competitions, in which it has been active for over 115 years. At present, the company participates in over 350 car and motorcycle sport events and since 2011 it has been the Global Tyre Partner to the Formula One™ World Championship.
Thanks to a strong commitment in research and development, Pirelli has over 2,000 people engaged in R&D located at its Milan headquarters and 12 local technology centers and a portfolio of 6,000 patents.
In 2023, Pirelli’s investment in R&D equaled 5,4% of its revenues from High Value products.

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Gas Detection

  • 13:50 – 14:10

Opening Gas Sensing Possibilities with Silicon Photonics-Based Sensors

Odorant VOCs (smells) is an infinite, nevertheless misunderstood and underestimated, source of valuable information which can offer very diverse business opportunities on different markets. In collaboration with the CEA-Grenoble, Aryballe has developed a selective VOC sensor capable of real-time detection and identification. This breakthrough technology enables the generation of large datasets, which can be analyzed using either simple algorithms or more sophisticated machine learning models.

More precisely, the 64 channels Mach Zender Interferometer (MZI) functionalized with proprietary peptide biosensors can detect a broad range of odors and chemical families. Moreover, this very innovative sensor has the property to generate live data within a large range of concentration.

In addition to addressing diverse industrial and environmental applications, Aryballe has successfully deployed its products in the Food and Cosmetics markets. More recently, breakthrough results have been obtained in the medical diagnostic domain with a focus on bacterial infection detection.

Dr. Tristan Rousselle

Founder & CEO

Aryballe

Tristan Rousselle holds a Ph.D. in Cell Biology from the University Grenoble Alpes. He completed part of his postgraduate studies at Sussex University (Brighton, UK) and the La Jolla Institute for Allergy and Immunology (San Diego, CA). In 2000, he co-founded a company called Protein’eXpert, now known as PX’Therapeutics. This biotechnology company specializes in the engineering, pre-clinical, and clinical development of therapeutic proteins. By 2011, PX’Therapeutics had more than 60 employees in Grenoble and Lyon and generated nearly 50% of its turnover outside Europe.

In July 2013, a few months after the acquisition of PX Therapeutics by the “Laboratoire Aguettant,” Tristan decided to launch a new venture with a leading innovative project in the field of Biosensors
named “Aryballe”. He founded the company in March 2014. Since then, Tristan has successively held the positions of CEO, Deputy CEO & CTO (2018-2022), and President & CEO since November 2022. Over the last 10 years, Aryballe SA
has raised over $25M, open offices in New York and Seoul and has progressively become the leader in the growing industrial domain of Digital Olfaction.

Aryballe’s products are based on a smart combination of Silicon photonics sensors co-developed with the CEA, as well as fluidics, imaging, data science, and user-friendly software.

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Aryballe combines biochemistry, advanced optics and machine learning to mimic the human sense of smell. Odors captured by the silicon photonics-based core sensor in our NeOse Advance are analyzed by the cloud-based Aryballe Suite to provide objective, fast analysis. This enables customers to leverage odor data for improved decision making for R&D, quality control, and manufacturing.

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Emerging Innovations and Research in MEMS & Sensors

  • 14:15 – 14:35

CSEM, a MEMS and PICs powerhouse in the Swiss industrial ecosystem

CSEM is a non-profit-oriented public-private Swiss technology innovation center renowned for developing advanced micro- and nanotechnologies. From high-performance materials to innovative processes, CSEM pushes the boundaries of microfabrication technologies to develop unique MEMS solutions. During the talk some of our most recent developments will be presented, including wafer scale micro-lens arrays, rubidium vapor cells for atomic clocks, our unique thin film lithium on niobate insulator (TFLN) PIC platform or the aerosol jet printing technology.

Dr. Andreas Charles Voelker

Business Development, Micro- & Nanotechnologies

CSEM

  • Scientist (PhD in physics) with 20+ years of experience in Photonics\
  • Expertise in development of photonic based analytic/diagnostic devices in regulatory environment
  • Extensive knowledge in interdisciplinary R&D project management, technology transfer, business development, coaching and consulting specifically at the interface of industry and research
  • Start-Up coaching
  • Married, two children

 

EDUCATION

Ph.D. in Nanophotonics, University of Fribourg, Switzerland, 2007

Diploma in Physics, Humboldt Universität Berlin, Germany, 2002

 

SOME WORK EXPERIENCE

CEO, LS Instruments AG, Fribourg, Switzerland (12 years)

Roche Diagnostics, Germany

Ypsomed, Burgdorf, Switzerland

CSEM, Neuchatel since 2021

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CSEM is a non-profit-oriented public-private Swiss technology innovation center renowned for developing advanced technologies with profound societal impact. Our mission is to transfer these innovations to industries, strengthening the economy. We are changing the face of the MEMS field by developing and industrializing processes for emerging materials and devices. With a multidisciplinary team and ISO-9001 standards, we provide a comprehensive one-stop-shop for the entire innovation chain. About CSEM – MEMS for a smarter future

CSEM is a non-profit-oriented public-private Swiss technology innovation center renowned for developing advanced technologies with profound societal impact. Our mission is to transfer these innovations to industries, strengthening the economy. We are changing the face of the MEMS field by developing and industrializing processes for emerging materials and devices. With a multidisciplinary team and ISO-9001 standards, we provide a comprehensive one-stop-shop for the entire innovation chain. From high-performance materials to innovative processes, we push the boundaries of microfabrication technologies. Our unique lithium on niobate insulator (LNOI) platform enables nonlinear photonic integrated circuits (PIC). In addition to our cutting-edge R&D we offer tailored devices including MEMS and LNOI PIC foundry services, and MEMS characterization and reliability testing. CSEM contributes to the development of reliable and advanced MEMS that pave the way for a smarter future.

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  • 14:40 – 15:10

Networking Break, Coffee and Business Meetings

  • 15:15 – 15:35

A Large Area, Panel-based sensor platform

Most sensor technologies are based on Silicon, wafer-based technology. This offers advantages in miniaturization and integration of advanced electronics. There is, however, a large application space in which there is a big advantage of having large sensor surfaces. Examples of these can be found in Non-Destructive Testing (e.g. pipeline or aircraft inspection) or medical imaging (e.g. wearable patches for continuous patient monitoring).
These applications require large area, low-cost, in some cases even flexible, sensor surfaces. To serve these needs IMEC is developing a large area sensor platform that is based on Flat-Panel Display compatible technology. In this presentation we will explain the benefits of this technology platform, and zoom in on our lead application for driving this technology: ultrasound medical imaging.

Erwin Hijzen photo

Dr. Erwin Hijzen

Program Director

imec

Erwin Hijzen received his PhD in Applied Physics from the Delft University of Technology. After that he has worked for Philips and NXP in the area of semiconductor technology, holding different R&D positions. He is currently working for IMEC, as director for the MEMS ultrasound program.

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Imec is a world-leading research and innovation center in nanoelectronics and digital technologies. Imec leverages its state-of-the-art R&D infrastructure and its team of more than 5,500 employees and top researchers, for R&D in advanced semiconductor and system scaling, silicon photonics, artificial intelligence, beyond 5G communications and sensing technologies, and in application domains such as health and life sciences, mobility, industry 4.0, agrofood, smart cities, sustainable energy, education, … Imec unites world-industry leaders across the semiconductor value chain, Flanders-based and international tech, pharma, medical and ICT companies, start-ups, and academia and knowledge centers. Imec is headquartered in Leuven (Belgium), and has research sites across Belgium, in the Netherlands and the USA, and representation in 3 continents. In 2021, imec’s revenue (P&L) totaled 732 million euro.

Further information on imec can be found at www.imec-int.com.

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  • 15:40 – 16:00

European Chips Act (EUCA) and the FMD Pilot line “Advanced Heterogenous Systems Integrations (AHSI)”

The European Chips Act will reinforce the semiconductor ecosystem in the EU, ensure the resilience of supply chains and reduce external dependencies. It is a key step for the EU’s technological sovereignty. The Research Fab Microelectronic Germany (FMD) propose the setup of an Advanced Heterogenous Systems Integration Pilot Line (AHSI-PL), which offered to Europe´s microelectronics community the world´s most comprehensive chiplet integration pilot. The pilot line will encompass an unprecedented range of device technologies, materials, enabled by world class system design, interconnect- and assembly techniques as well as characterization, test, reliability and security assessment. Our mission is to establish and operate a pilot line, which offers to European industry including start-ups, SMEs, verticals, Integrated Device Manufactures’(IMD’s) as well as R&D institutions innovation capabilities through advanced heterogeneous systems, based on Chiplets and novel Advanced Packaging Technologies and will have an open access. The presentation gives a strategic overview about the foundation and participation in the European Chips Act.

Dr. Michael Eritt

Head of Department Engineering

Fraunhofer IPMS

Dr. Michael Eritt heading the Engineering Department for the MEMS and CMOS 200 mm cleanroom. He joined Fraunhofer IPMS in 2020 as group leader and was responsible for the technology development of MEMS scanners. Prior joining Fraunhofer he worked 10 years in the lighting and PV industry as product developer of OLED lighting modules and manager back-end with focus on scaling production from lab to fab for organic solar films. Michael Eritt graduated in Microsystem Technology in 2003 and received his PhD in electrical engineering from Technical University of Chemnitz in 2010.

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The Fraunhofer Institute for Photonic Microsystems IPMS in Dresden Germany is your access to know-how, expertise, and modern R&D infrastructure in the field of optical sensors and actuators, integrated circuits, microsystems (MEMS/MOEMS) and nanoelectronics. The Fraunhofer IPMS is one of 76 institutes of the Fraunhofer-Gesellschaft, the leading organization for applied research in Europe. Relying on more than 30,000 employees, the Fraunhofer-Gesellschaft has a research budget of 2.9 billion euros. Around 70 percent of this sum are generated through industrial commissions and publicly financed research projects.

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  • 16:05 – 16:25

From Concept to Application: INL’s Breakthroughs in MEMS Technology

The International Iberian Nanotechnology Laboratory (INL) is a research centre equipped with state-of-the-art microfabrication and characterization facilities. Aiming to be a global leader in nanotechnology innovation, INL focuses on strategic research areas, with MEMS as a crucial enabling technology. In this presentation, Dr. Filipe Alves, a Staff Researcher in the Integrated Micro and Nanotechnology Research Group, will highlight some of the key contributions in MEMS technology. Topics will include high-resolution inertial sensors for space gravimetry, multi-mass devices with 3-axis sensitivity, and an all-silicon, multispot 2D MEMS mirror.

Filipe Alves

Staff Researcher

INL (International Iberian Nanotechnology Laboratory)

Dr. Filipe Serra Alves is currently a Staff Researcher within the Integrated Micro and Nanotechnologies Research Group at INL – International Iberian Nanotechnology Laboratory, Portugal. His research is focused on the development of new integrated systems that range from the design and fabrication of MEMS devices, to the instrumentation and control electronics, both at the discrete and integrated level.He obtained his PhD in microelectronics in 2017, specializing in pull-in based MEMS inclinometers with integrated mixed-signal electronics, from the University of Minho, Portugal, in collaboration with the Delft University of Technology, The Netherlands. Prior to joining INL as a Research Fellow, he served as an assistant professor in the Industrial Electronics Department at the University of Minho. Recently, he has been working in new sensor concepts, including polyimide-based flexible devices and high-resolution MEMS inertial sensors, with a particular interest in FPGA and ASIC-based high-performance digital systems. As a principal investigator, he has coordinated several research projects targeting new transduction mechanisms and working principles, aiming to push the boundaries of MEMS technology. Dr. Alves has authored numerous high-impact publications and serves as a reviewer for top-tier journals in the field, including IEEE Sensors Journal, Journal of Microelectromechanical Systems, Sensors and Actuators A: Physical or Nature Scientific Reports.

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The International Iberian Nanotechnology Laboratory is one of the main international research centres dedicated to nanoscience.

The Laboratory is an intergovernmental organization founded in 2005 upon a joint agreement between Portugal and Spain. Today, it houses a multicultural community of more than 400 researchers from 30 nationalities with various scientific backgrounds. Headquartered in Braga, northern Portugal, INL focuses on strategic research areas that deepen our understanding of fundamental phenomena, serving as the basis for the development of innovative technologies.
Key areas include clean water, clean energy, zero hunger, good health, and overall well-being. INL’s mission is two-fold: to carry out excellent research in nanotechnology, and to engage with society by means of technology transfer and public outreach. This twin approach guides the organisation to navigate the unknown universe of science, and to identify new research areas at the intersection of established knowledge fields. The overarching objective is to advance research anchored in nanotechnology towards new science and novel methodologies, and to devise nanotechnology-based solutions, in the physical and human environments, mediated by cutting-edge research in information and communication technologies.

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