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Shellback Semiconductor Technology

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ISES Member

Company Profile

With pioneering intellectual property and global services, SHELLBACK Semiconductor Technology provides best-in-class equipment solutions, upgrades, and support to enable key markets such as Power Devices, Photonics & LED, MEMS & Sensors, Wireless & Analog, Memory/Storage, and Advanced Packaging. SHELLBACK unites industry-leading semiconductor brands SEMITOOL, FSI MERCURY/MERCURY+ & RITE TRACK, with a combined product portfolio addressing Wet Processing & Coat Develop with proven solutions.

Our best-in-class technology includes solutions to:

  • provide low CoO / High throughput critical wet clean, etch, strip solutions with MERCURY+ systems and upgrades as the product line owner. This includes controller upgrades for existing FSI Mercury systems to extend equipment life and automatted loading solutions.
  • dramatically reduce wet chemical usage and footprint with TORRENT & TORRENT ECO-Clean, our award winning SEMITOOL batch spray technology to 300mm. Industry-proven SOT, SAT, SST applications to address your needs.
  • address industry Coat Develop needs with proven systems & upgrades across a variety of industry favorite lines including SVG 8X/9X as the product line owner.
  • improve fab yield with our proven SEMITOOL STORM Carrier Cleaning System.

 

Product & Services

We provide systems, upgrades, parts and technical support for the following systems.
* denotes product line owned by SHELLBACK

Wet Clean . Etch . Strip

  • MERCURY+ * (100mm – 200mm)
  • MERCURY+ SP* (Automated – 100mm – 200mm)
  • TORRENT* (up to 200)
  • TORRENT SP* (Automated – Up to 300mm)
  • SEMITOOL SRD* (Up to 300mm)

Carrier Cleaning

  • STORM SEMITOOL Carrier Cleaning* (up to 300mm)

Coat / Develop

  • SVG 8X and 9X* (up to 200mm)
  • TEL Mark & ACT – Refurbished (up to 200mm/300mm)
  • DNS 80 – Refurbished (up to 200mm)