MWS Research Institute Update
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Overview of Some Recent Technological Innovations Under Development at CEA-Leti Aiming the New MEMS Market Trends
Presented by: Philippe Robert, Business Development Manager & Senior Expert MEMS – CEA-Leti
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Innovative MEMS Ideas Become Reality feat. Fraunhofer
Presented by: Thomas Zarbock, Division Director – MEMS Engineering, Manufacturing & Test – Fraunhofer IPMS
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The Power of MEMS and Semiconductor-based Sensor Technologies for Sustainable Healthcare
Presented by: Xavier Rottenberg, Scientific Director & Group Leader Wave-Based Sensors & Actuators – IMEC
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Bridging MEMS from Research to Production in the Gap of Small Quantities
Presented by: Prof. Dr.-Ing. Alfons Dehe, Director – Hahn-Schickard Institut for Micro and Information Technologies
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Business Development Manager & Senior Expert MEMS – CEA-Leti
Philippe Robert is Business Development Manager & Senior Expert at CEA-Leti for the MEMS Sensors and Actuators activities.
After serving various positions in the sensor industry, he joined CEA-Leti in 2001 as project manager for RF-MEMS research and was promoted to manager of the MEMS Sensors Group from 2003 to 2013, and head of the Microsystems Department from 2013 to 2019.
He received a M.Sc. degree in optical electronic in 1991 and a Ph.D in electrical engineering in 1996 from Grenoble-INP, France. He has authored or co-authored about 40 journal papers and conference contributions, and holds more than 60 patents dealing with MEMS and NEMS. He was member of the IEEE-MEMS Technical Committee in 2007 and 2008 and of the International MEMS Industry Forum Committee at SEMI Europe 2014. Currently, he is member of the International Steering Committee of TRANSDUCERS conference, of the EUROSENSORS conference and of the MEMS & Imaging Sensors Summit.
CEA-Leti has been working on MEMS technology since 1978 and has continuously innovated to become now, one of the leading research institutes on MEMS sensors and actuators.
Since the beginning, Leti is supporting the development and competitiveness of its industrial partners by offering them new concepts and technologies. In recent years, these MEMS manufacturers are facing a market that tends to move into a mature phase, which requires to bring technological breakthroughs that could open up new opportunities.
In this context, this presentation will detail certain MEMS innovations that are currently being developed at CEA-Leti such as, pMUT ultrasonic beamforming, transparent piezoelectric technology for haptic devices and high-performance inertial sensor.
CEA-Leti, a technology research institute at CEA Tech, pioneers micro and nanotechnologies, tailoring differentiating applicative solutions that ensure competitiveness in a wide range of markets. The institute tackles critical challenges such as healthcare, energy, transport and ICTs.
Its multidisciplinary teams deliver solid expertise for applications ranging from sensors to data processing and computing solutions, leveraging world-class pre-industrialization facilities.
CEA-Leti builds long-term relationships with its industrial partners – global companies, SMEs and startups – and actively supports the launch of technology startups.
Division Director – MEMS Engineering, Manufacturing & Test – Fraunhofer IPMS
Thomas Zarbock is Division Director at the Fraunhofer Institute for Photonic Microsystems. He has 10 years experience in MEMS manufacturing and pilot fabrication. In his position, he is responsible for a team of 95 engineers, technicians and operators to run and maintain a fully integrated and CMOS-compatible 200mm MEMS cleanroom.
Prior to joining Fraunhofer IPMS, Thomas held various contributor level and management positions in industrial engineering and semiconductor manufacturing. He has been working 11 years for Siemens, Infineon Technologies and Qimonda, Dresden. His emphasis was in production and fab planning, cycle time management and lean manufacturing.
Thomas Zarbock received the M.S. degree in Industrial Engineering from the Dresden University of Applied Sciences, Dresden, Germany.
As the unwritten “MEMS law” says, developing and prototyping a new MEMS product takes 5 years and more being a challenge for the community.
By enhancing cooperation between MEMS based companies and MEMS research associations, risks in time-to-market and efforts can be shared and minimized.
Fraunhofer is not only supporting as R&D and technology development partner but also enables initial pilot manufacturing and process transfer to your volume fab of choice.
The Forschungsfabrik Mikroelektronik Deutschland (FMD) has joined forces to build up the largest cross-site R&D cooperation for micro and nano electronics in Europe.
FMD bridges the gap between fundamental research and customer-specific product development using both approaches – push and pull.
In this webinar, insights into highlighted MEMS developments at several Fraunhofer institutes involved in the FMD will be provided.
In accordance with the overall concept of the Fraunhofer-Gesellschaft, the Fraunhofer Institute for Photonic Microsystems IPMS focuses on applied research and development on behalf of industry and society.
Fraunhofer IPMS is a worldwide leader in research and development services for electronic and photonic microsystems in the fields of Smart Industrial Solutions, Medical & Health applications and Improved Quality of Life. Innovative products can be found in all large markets – such as ICT, consumer products, automobile technology, semiconductor technology, measurement and medical technology – products which are based upon various technology developed at Fraunhofer IPMS.
We develop electronic, mechanical and optical components and work on their integration into miniaturized modules and systems. We aim for customers who want to increase the functionality of their products by use of microsystems (MEMS, MOEMS, CMOS) with innovative features and smaller dimensions. We offer the complete value chain: From conception to product development right up to sample and pilot production within our labs and clean rooms; from components to the complete system solution.
Scientific Director & Group Leader Wave-Based Sensors & Actuators – IMEC
Dr. Xavier Rottenberg obtained his MSc degree in Physics Engineering and the DEA in Theoretical Physics from the Université Libre de Bruxelles in 1998 and 1999, respectively. In He 2008, he earned his Ph.D. degree in Electrical Engineering from the KU Leuven. Xavier worked at the Royal Meteorological Institute of Belgium in remote sensing from Space for one year and has been at imec since 2000, contributing to research in the field of RF, RF-MEMS, photonics, and microsystems modeling/integration. As an imec fellow, Xavier currently leads the Wave-based Sensing and Actuation Developments, working among other topics on integrated photonics, flat optics, acoustics, photo-acoustics, and M/NEMS. He has authored or co-authored over 150 peer-reviewed publications, has been granted various patents, and has lectured or been an invited speaker at notable events including: DTIP (‘05), EuroSimE (‘08), ESREF (‘08), ESoA (‘10/‘12/‘14), RF-MEMS summer school (‘13), FETCH 2016, NERF Neurotechnology Symposium (‘16), OpenMinds (‘17), and Nanoworkshop at Beijing University (‘18). In 2019, Xavier co-founded Pulsify Medical—a young company developing ultrasound imaging patches.
Affordable, point of care diagnostics are essential for rapid and early detection of diseases and to facilitate better disease management and monitoring. Semiconductor technologies, such as MEMS and sensors, open the door to this new era by enabling cost-efficient, mass manufacturable, and miniaturized medical sensing devices. In this talk, we’ll cover imec’s recent results in ultrasound technology and give an overview of next-generation MEMS technologies based on silicon photonics.
Ultrasound technology has been widely used in medical devices. However, current solutions – based on conventional technologies such as piezo-ceramic materials – are bulky and cannot be easily put in arrays. This limits the compactness of the final solution that is key for, e.g., portable ultrasound systems or ultrasound on catheter. Imec’s piezoelectric ultrasound micromachined transducers (pMUT) allow close integration of the electronics (i.e., ASIC) with the transducers, thus realizing highly performant and compact systems. Silicon photonics has been the workhorse for data and telecom and high-performance computing for years. Silicon photonics sensors have the potential to revolutionize medical diagnosis, not only in the field of biosensing but also to build next-generation medical imaging applications using next-generation MEMS. By integrating photonics in MEMS, so-called MOMS (micro-optomechanical systems) can be developed. MOMS convert the mechanical movement of a membrane into an optical signal. These miniaturized sensors uniquely combine great accuracy, wide dynamic range, and low detection limit, which is key for medical imaging applications such as, e.g., deep-tissue mammography or the study of vascularization or innervation of potential tumorous tissues.
Profile coming soon…
Director – Hahn-Schickard Institut for Micro and Information Technologies
Alfons Dehé, was born 1967 in Aachen.
He has studied solid states physics at the RWTH Aachen until 1992.
He started compound-semiconductor micromachined sensors at the Radio Frequency Technology Institute at the Technical University of Darmstadt where he finished with a PhD in 1997.
In 1998 Alfons joined the Siemens / Infineon Technologies AG developing micromachined Silicon microphones for medical, automotive and mobile communication applications. This innovation resulted in products running in billion pieces per year paving market leadership for Infineon in this field. Further, he was leading integrated SiGe RF circuits as well as the supply of small-scale integrated Silicon solutions for avionic and space applications. He pushed for further MEMS innovations heading for best in class Silicon microphones, micro speakers and gas sensors.
In 2017 he was appointed to the endowed Georg H. Endress professorship “Smart Systems Integration” at the Department of Microsystems Engineering at the University of Freiburg. He is heading the Hahn-Schickard Institut for Micro and Information Technologies in Villingen-Schwenningen. In this function, he is bridging from basic research into applied development and production in the field of MEMS.
He is author and co-author of more than 120 publications and more than 120 patent families.
Since 1989 Hahn-Schickard runs a MEMS clean room that was installed foster innovations against the declining regional watch industries. Nowadays, our mature non-profit organization offers solutions in the fields of life science, industry and environment based on all disciplines of micro system engineering. An intimate link to universities guaranties scientific excellence. The Silicon based MEMS development and fabrication out of an ISO qualified clean room is a strong asset. It is key for partners and customers that profit from short cycle times in R&D, custom specific designs and a deep system understanding. Small medium size companies and start-ups value the high quality delivered even in small quantities over decades. If needed we can scale up fast or to transfer into external mass fabrication. The portfolio ranges from inertial sensors, thermal sensors to acoustical sensors for all kinds of custom specific applications. Finally, finest watch gears and springs are fabricated for high-end watch industries, closing the local loop of innovation.
Profile coming soon….
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May 25, 2021 – 8:00 AM (PST)
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May 26, 2021 – 18:00 PM (CST)
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