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Going Vertical With MEMS: Unfolding System-Level Development Of Scanning Micromirror Technologies

Being a top European research center for electronic based systems, Silicon Austria Labs (SAL) offers cooperative research in the pioneering areas of Microsystems, Sensor Systems, Intelligent Wireless Systems, Power Electronics and Embedded Systems. SAL connects key industrial and scientific players for the appli­ca­tion-oriented re­search along the value chain. It accelerates the processes from idea to innovation within the major market tendencies on the global arena.

In his presentation, Dr. Mohssen Moridi, Head of Research Division Microsystems, will discuss the system-level development of scanning micromirror technologies with focus on MEMS-based vertical integration, from initial concept to applied demonstrator. Metasurfaces, passivation coating, embedded AI algorithms and ASIC integration will be outlined as added functionalities.

Dr. Mohssen Moridi photo

Dr. Mohssen Moridi

Head of Research Division Microsystems

Silicon Austria Labs (SAL)