27-28 August 2025
Suwon
Ilya Zabelinsky is a globally recognized technical leader with nearly 30 years of experience in vacuum and gas abatement applications for semiconductor manufacturing. Ilya joined Intel in 1996, contributing to the startup and commissioning of Israel’s first 200mm FAB. He emerged as an operational and technical leader across Intel SubFABs worldwide.
In 2022, Ilya embarked on a mission to “bring Science to SubFAB” and founded the International SubFAB Research Labs. Ilya holds a B.Sc. in Chemical Engineering and possesses broad knowledge and vast practical experience in semiconductor manufacturing processes, FAB equipment, central facilities, and infrastructure.
International SubFAB Research Labs (ISRL) is a privately owned company founded by highly experienced and skilled team of semiconductor industry veterans.
ISRL’s vision is to fill the immense gap between industry’s desire for sustainable manufacturing and its ability to effectively address fundamental efficiency issues associated with handling, abatement and reclaim of hazardous process material waste streams. In other words – all is SubFAB.
ISRL is a first of kind facility with complete infrastructure required to operate a l fleet of 300mm process tools with versatile setup of deposition and dry etching process chambers, in high volume manufacturing-like conditions, to enable a wide range of sustainability research and development projects.