11:55 – 12:15
Fast-Tracking PiezoMEMS: From Concept to Manufacturing Readiness
This talk presents the recent advancements in piezoelectric MEMS (piezoMEMS) technology at the Institute of Microelectronics (IME), A*STAR, and highlights the strategy to accelerate the transition from innovative concepts to manufacturing-ready solutions.
Zhu Yao, Ph.D.
Institute of Microelectronics, A*STAR
Zhu Yao is Head of the MEMS Department at IME, A*STAR Singapore, focusing on MEMS for sensing, actuation, and wireless communication. She earned her Ph.D. from Nanyang Technological University in 2015. Zhu Yao is an active IEEE member, serving as associate editor for IEEE MEMS Journal and holding various committee roles. She received the SEMI MEMS & Sensors Industry Group Emerging Leaders Award in 2022.
Institute of Microelectronics, A*STAR
Company Profile
Established in 1991, the Institute of Microelectronics (IME) is a research institute under Singapore’s Agency for Science, Technology and Research (A*STAR). In IME, we focus on delivering high impact research and development for the global semiconductor industry. IME’s role is to collaboratively develop and innovate next-generation technologies to enable a dynamic semiconductor ecosystem. Together with our highly skilled talent pool, we develop strategic capabilities and innovative technologies through state-of-the-art infrastructure. IME’s core research areas are in Advanced Packaging, piezoMEMS, SiC, mmWave GaN, and photonics & sensors. We will continue to shape the semiconductor industry’s roadmap for many years to come.
