09:50 – 10:10
Building a MEMS and Optoelectronics Platform to Enable Technological and Industrial Innovation
R&D pilot platforms are essential for advancing MEMS and silicon photonics, providing the foundation for transforming research breakthroughs into manufacturable technologies. SITRI has built China’s first open 8-inch “More-than Moore” platform dedicated to MEMS and silicon photonics development. It supports the entire innovation chain from design and process development to pilot production, mass production, testing and packaging—enabling rapid prototyping and industrial scaling. SITRI also fosters an innovation ecosystem that connects industry, academia, and research. Through joint development projects, shared facilities, and incubation programs, it accelerates technology transfer and the commercialization of emerging microsystems. By combining strong process capabilities with collaborative innovation, SITRI has become a key enabler of industrial transformation in MEMS and silicon photonics, strengthening the foundation for next-generation intelligent sensing and optical interconnection technologies.
Wei Wang, Ph.D.
Shanghai Industrial Technology Research Institute (SITRI)
Wang Wei, PhD from the Institute of Semiconductors, Chinese Academy of Sciences, is a Shanghai High-Level Talent, Director of Silicon Photonics at SITRI, and chief scientist of National Key R&D Program projects. With over 15 years of experience in R&D of silicon-based optoelectronic materials and devices, he has published more than 80 papers in top international conferences and journals in this field, and holds over 30 authorized national invention patents. As a project/topic leader, he has led a number of national key and major projects, and spearheaded the construction of SITRI’s silicon photonics process platform and the company’s external wafer foundry services.
汪巍，中国科学院半导体所博士，上海市高层次人才，上海工研院硅光总监，国家重点研发计划项目首席，从事硅基光电子材料和器件研发超过15年，在该领域顶级国际会议和期刊发表论文80余篇，授权国家发明专利30余项，作为项目/课题负责人牵头多项国家重点重大项目，主导完成工研院硅光工艺平台建设及公司对外流片服务。
Shanghai Industrial Technology Research Institute (SITRI)
Company Profile
Shanghai Micro-Technology Industrial Research Institute (SITRI) was established in 2013 by Shanghai Science and Technology Commission, Jiading District Government and Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. It is a R&D and transformation functional platform integrating R&D, engineering, industrialization and cultivation, providing in-depth process technology support and services for innovative enterprises and partners. SITRI was established under the guidance of Shanghai Lianhe Investment Co., Ltd.’s strategic mission of serving the national strategy and being a pioneer in scientific and technological development. It relies on the “three-in-one” innovation architecture model of Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. With the support of the technical strength of Shanghai Institute of Microsystem and the investment and operation model of Shanghai Xinwei Technology Group, it has established close cooperative relations with many domestic and foreign production, learning and research organizations, realized the efficient industrialization of innovative achievements, and accelerated the establishment of the “More than Moore” industrial ecosystem.
· SITRI has the first 8-inch “More than Moore” R&D pilot line in China, providing “More than Moore” core process technologies such as MEMS, silicon photonics, and biochips, and providing efficient R&D, pilot and verification services for semiconductor companies such as design, equipment and materials, realizing seamless connection from R&D to small batch production.
· Up to now, SITRI has applied for 877 patents, 697 invention patents, including 56 PCT (international patent) patents. · SITRI is based in Shanghai, facing the Yangtze River Delta, and radiating across the country, and has initially formed an industrial ecosystem in the field of “More Than Moore”.
