27-28 August 2025
Suwon
17:20 – 17:30
Electroless Metallization of power semiconductor devices – challenges and benefits 功率半导体器件的化学镀金属化—挑战与机遇
在当今世界,随着电气化、电动汽车以及实现绿色能源的灵活应用,对功率半导体器件的需求在不断增加。为保持下一代功率半导体器件的灵活性和可靠性,越来越紧迫是,不仅需要应用新的半导体材料(例如SiC、GaN),而且需要应用替代制造技术。
MKS公司的化学镀金属化工艺是用于功率半导体器件制造的这些替代技术的一部分,并且已经在该行业中应用超过了十年。其自对准金属化的优点与物理金属化技术相比,具有更高的产能和更低的生产成本。通常,化学镀工艺被用于铜基或者铝基的最终处理;另外还有一种可能性,就是在半导体材料(例如Si、SiC、GaN)表面直接用化学镀工艺沉积金属以形成一个可靠的欧姆接触。
Dr. Stefan Pieper
mks | Atotech
Stefan Pieper has studied chemistry in Berlin, Germany where he also completed his PH.D. in analytical chemistry. In 2009 he joined Atotech as Application Scientist in the department of Semiconductor Advanced Packaging processes where he used the opportunity to gain deep insight in multiple electrochemical metallization processes and their characterization for semiconductor application. During his work as Application Scientist, he also spent over 3 years in the US where he optimized Cu dual damascene electrodeposition and Through Silicon Via plating. In 2020 he took over the position of Global Application Manager for Electroless deposition processes in semiconductor application at Atotech. In his current position he is leading a team that provides wet-chemical solutions for semiconductor metallization with the focus on power semiconductor.
Stefan Pieper博士曾在德国柏林学习化学,并在那里获得分析化学博士学位。2009年,他加入安美特,担任半导体先进封装工艺部应用科学家。利用这个机会,他深入了解了多种电化学金属化工艺及其在半导体应用中的特性。在担任应用科学家期间,他还在美国花了3年多的时间,优化了双大马士革铜互连工艺和硅通孔电镀工艺。2020年,他接任安美特半导体化学镀工艺全球应用经理一职。在目前的职位上,他领导的团队为半导体金属化提供湿制程解决方案,重点是功率半导体。
mks | Atotech
Company Profile
Atotech, a brand within the Materials Solutions Division of MKS Instruments, develops leading process and manufacturing technologies for advanced surface modification, electroless and electrolytic plating, and surface finishing. Applying a comprehensive systems-and-solutions approach, Atotech’s portfolio includes chemistry, equipment, software, and services for innovative and high-technology applications. These solutions are used in a wide variety of end-markets, including datacenter, consumer electronics and communications infrastructure, as well as in numerous industrial and consumer applications such as automotive, heavy machinery, and household appliances. With its well-established innovative strength and industry-leading global TechCenter network, MKS delivers pioneering solutions through its Atotech brand – combined with unparalleled on-site support for customers worldwide. For more information about Atotech, please visit us at atotech.com