09:50 – 10:00
Modeling tools for optimization semiconductor manufacturing processes: from material to device
Computer modeling has long been recognized as a powerful tool for accelerating development and reducing the costs of various manufacturing processes. In the semiconductor industry, modeling has already become a reliable workhorse for certain production processes, while for other processes, companies are still looking for modeling solutions that could capture complex physical and chemical phenomena to support further technology development.
In the present work, we demonstrate the latest capabilities of STR’s modeling software, which enable accurate analysis and optimization across multiple stages of semiconductor manufacturing, including crystal growth, epitaxy, and device processing steps such as oxidation, ALD, and etching.
Andrey Smirnov
STR
Andrey Smirnov started his journey in crystal growth modeling in 2006 when he joined STR as a student. During his early years at STR, he was involved in the modeling and development of physical and chemical models for different crystal growth processes, contributing to the development of models that became an integral part of the CGSim software, which is now used by all leading manufacturers of electronic and solar grade silicon wafers.
In 2009, Andrey Smirnov was promoted to the position of Product Line Manager and began his activities in managing cooperation projects with STR’s partners, interaction with clients and business development.
From 2022 Andrey Smirnov serves as Director of Business Development in STR Belgrade. His current activities include building relationships with customers, managing key cooperation projects and guiding the development of new models and software features potentially interesting for the global semiconductor community.
STR
Company Profile
STR provides specialized software and consulting services for modeling of crystal growth, epitaxial process, device processing, and operation of semiconductor devices. A comprehensive research stays behind every consulting activity and software product which enables careful validation of physical models and approaches applied. STR’s expertise in the crystal growth science and device engineering is presented in variety of publications.
Company Products & Services
Five software product lines are being developed and promoted by STR:
– Crystal growth from the melt and solution;
– Wide-bandgap crystal growth from gas and vapor;
– Deposition and epitaxy;
– Device processing;
– Optoelectronic devices.
Software packages:
CGSim – Cz, DSS, Kyropoulos, Bridgman crystal growth from the melt (Si, Ge, GaAs, InP, CZT, Sapphire, YAG, LN, and more);
PolySim – polysilicon deposition by Siemens process;
Virtual Reactor – bulk crystal growth of SiC, AlN, GaN by PVT and HVPE;
DiaDeMo – CVD growth of Diamond;
CVDSim3D – epitaxy of compound semiconductors (Si, SiC, III-V, III-Nitride)
STREEM – stress buildup and relaxation in the AlGaN and InGaN based epitaxial stacks
IProS 2D – device processing steps (LPCVD, oxidation, ALD, ALE, etching);
SimuLED – optoelectronic and electronic devices (LEDs/LDs, FETs, Schottky diodes)
