TRUMPF Huettinger Electronics (Taicang) Co., Ltd.

Company Profile

TRUMPF Hüttinger, headquartered in Germany, is the global market leader for process power, semiconductor, display, and solar supplies.

We are developing, manufacturing plasma power supplies for a wide range of deposition and dry-etch processes. Our products offer best in class uptime, energy efficiency, coating quality and high productivity. TRUMPF Hüttinger has sales and service subsidiaries in Asia, Europe and America.

Products & Services

  1. TruPlasma DC 4000 (G2) Series
    The TruPlasma DC Series 4000 (G2) combines the excellent arc handling of TRUMPF Hüttinger with the advantages of DC pulse technology. This means you gain improved coating results with fewer defects, along with a higher deposition rate. The results are brilliant surfaces and a high level of production power.
  2. TruPlasma DC 3000 (G2) Series
    The TruPlasma DC Series 3000 (G2) is suited to numerous DC sputtering processes. The DC generators also make an interesting cost-effective alternative to pulsed DC generators due to their progressive arc management and the integrated water cooling. The very compact design also enables simple integration into existing applications.
  3. TruPlasma RF 1000/3000 (G2/13) Series
    The TruPlasma RF Series 1000 / 3000 (G2/13) are the latest generation of RF generators. Due to innovative functions such as the patented CombineLine coupling technology or real-time measurement of all process parameters, reliable power supply even in demanding plasma processes is guaranteed – the optimal conditions for reproducible results and high productivity.
  4. TruPlasma LF Series
    TruPlasma LF 1000 series are based on an innovative platform concept with frequency ranges of 350k, 400k, 2M and power ranges from 1 to 10kw for all types of semiconductors, photovoltaic, ALD, and etch plasma applications.
  5. TruPlasma VHF 3000 series
    The highest power for your process: T

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