Tetsuo Endoh, Ph.D.
Director/Professor
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Tetsuo Endoh joined ULSI Research Center Toshiba Co. in 1987 and was engaged in the R&D of NAND Memory. He became a lecturer at the Research Institute of Electrical Communication, Tohoku University in 1995. He is a professor at the Department of Electrical Engineering, the Graduate School of Engineering, Tohoku University and director of the Center for Innovative Integrated Electronic Systems (CIES). His current interests are novel 3D structured device technology, such as Vertical MOSFETs; high-density memory, such as SRAM, DRAM, 3D-NAND memory and STT-MRAM; and beyond-CMOS technology, such as spintronics-based non-volatile Logic for ultralow power systems such as mobile systems, AI systems and IoT systems. He is also interested in power-management technology, such as GaN on Si based power devices and power integrated circuits with low energy loss and low power consumption for automotive applications. He received the 14th Prime Minister’s Award for his Contribution to Industry-Academia-Government Collaboration in 2016.
He received 2017 National Invention Award “the 21st century Encouragement of Invention Prize” on June 12th for his contribution of the invent of 3D-NAND Memory technology. He received a 2020 VLSI Test of Time Award, VLSI Symposium, 2021. He was a Fellow of the IEEE from 2023.
The Center for Innovative Integrated Electronic Systems (CIES) has conducted the CIES consortium consisting of industry-academia joint researches, major national projects, and regional collaboration projects from fields such as materials, equipment, devices, circuits and systems through the cooperation of domestic and foreign companies with support of local government. CIES has expanded its R&D field from spintronics to AI hardware and power electronics, and has promoted to develop core technologies related to integrated electronics. To date, the center has developed various innovative technologies with highest performance in the world, has made progress in developing IoT and AI systems that require ultra-low power consumption. In addition, with the establishment of the startup “Power Spin Inc.” from Tohoku University, we are accelerating the development of the innovative technologies that we are developing into social implementation and the further advancement of industry-academia collaboration. In June 2021, Tohoku University established the Tohoku University Semiconductor Technology Co-creation to contribute to Japan’s semiconductor strategy and the world’s energy-saving society. In addition to this co-creation, CIES is positioned as a spintronics low power logic semiconductor development base in Japan’s semiconductor strategy, and is further strengthening efforts for promotion of industry-academia-government co-creation and social implementation. We will continue to create innovative core technologies and contribute to the industry and the enhancement of global competitiveness by the practical applications, and “new creation and innovation” through global and regional partnership.
Nahomi Aoto, Ph.D.
Professor by Special Designation
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Dr. Nahomi Aoto is working at Hiroshima University as Professor by Special Designation and at Tohoku University as Visiting Professor by Special Designation, from August 2023 after she retired from Micron. She specializes in workforce advancement of university students and younger students, especially women, to attract them to semiconductor technology areas. Before university Dr. Aoto had served semiconductor industry from 1983 to 2023 and contributed to process R&D. She worked for NEC, Elpida Memory, Micron Memory Japan and Micron Technology as a researcher/engineer, manager, Sr. director and officer. In 2019 – 2023, Dr. Aoto focused on building good relationships between students/university and semiconductor industry by giving lectures and speeches, and inspired students to work for semiconductor technology and industry. She had also led women leadership program of Micron until her retirement. Dr. Aoto was chosen as one of four final nominees of 2020 Rising Women of Influence Award of Global Semiconductor Alliance (GSA).
Monita Pau, Ph.D.
Strategic Marketing Director, Advanced Packaging
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Monita Pau is currently Strategic Marketing Director for Advanced Packaging at Onto Innovation. She works with business leaders and executives to drive strategic planning and leads the development of collaborative initiatives to drive growth and innovation. With over 15 years of experience, her expertise spans across frontend and backend of line process control solutions as well as specialty materials for advanced packaging and assembly. Prior to joining Onto, she held various positions in applications engineering, marketing and strategic business development at DuPont and KLA. Monita holds a Ph.D. degree in Chemistry from Stanford University.
Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; elemental layer composition; overlay metrology; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization.
General Telephone: +1 978 253 6200
General email: info@ontoinnovation.com
Website: www.ontoinnovation.com
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