Beneq Transform® is an ALD cluster tool designed for technology development and manufacturing across power electronics (SiC, GaN, Si), RF, optoelectronics, microLED, MEMS, and sensors. Built for volume production, Beneq Transform scales with throughput and application requirements. It is an ideal platform for applications requiring surface engineering such as surface passivation of wide-band gap materials. Beneq Transform® 300 extends the offering to 12 ” wafer size.

• Filters that purify process gases, fluids, and the ambient fab environment
• Liquid systems that dispense, control, analyze, or transport process fluids
• Gas delivery systems that safely store and deliver toxic gases
• Advanced liquid, gaseous, and solid precursors for chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes
• Advanced materials for wafer surface preparation and integration (SPI) and other processes requiring high purity chemistries
• Specialty chemicals including organometallic and organosilane materials used in semiconductor device manufacturing, monomers and polymers used in the manufacture of medical devices, and isotopically labeled materials used in clinical diagnostics
• Polishing pads for chemical mechanical planarization (CMP) applications
• Slurries for CMP applications and for polishing other substrates including ultra-hard surfaces like silicon carbide (SiC) and gallium nitride (GaN)
• Single-use assemblies for purity and reliability in storage, freezing, and shipment of biopharmaceutical products
• Specialty coatings that provide high-purity surfaces for wear resistance, corrosion protection, and smoothness
• Premium graphite and silicon carbide for high-performance applications
• Shippers and trays for protecting and transporting medical device and disk drive components
• Microenvironments that protect semiconductor wafers and reticles from contamination and breakage
• Cleaning solutions for e-chucks, probe cards, and test contactors

With our 48 product lines and over 300 unique products, our growing portfolio offers a comprehensive suite of optical and electrical metrology solutions designed to ensure precision, reliability, and efficiency in Material Characterization with a special focus on Si, SiC and GaN, Advanced Packaging, Panel Level Packaging and Photonics.
LST is industry standard for monitoring and analysis of bulk microdefects, while the Semilab AFM enables nanoscale surface roughness monitoring and defect review of Si, SiC, GaN samples. PMR monitors various ion-implant parameters by Si and SiC wafer production. EIR is designed for epi thickness characterization. uSE offers high-throughput thin film characterization. En-Vision targets non-destructive detection of buried defects.
With our 1600 employees worldwide, together we participate in the entire manufacturing process of measuring instruments from the first spark of idea to the last test-run before delivering the product to the customer.
Semilab covers the entire R&D lifecycle of product innovation, from research, metrology development and manufacturing to implementation, leading to more efficient production and control, while guaranteeing the highest-level user experience possible.

We’re here to become your trusted partner, helping evolve your production capacity and unlock new levels of semiconductor manufacturing excellence.

Our comprehensive spare parts division provides essential components and consumables that keep your equipment running reliably. Process control solutions enhance manufacturing precision and quality monitoring capabilities. Tool upgrade services extend equipment life and performance without major investment.

Professional repair services restore functionality to critical components at reduced costs compared to replacement. High-quality sputtering targets ensure consistent deposition results across your processes.

Every solution helps you achieve higher yields, lower operational costs, and more reliable production outcomes with expert technical support throughout.