Platinum
Shanghai Industrial Technology Research Institute (SITRI)
Shanghai Micro-Technology Industrial Research Institute (SITRI) was established in 2013 by Shanghai Science and Technology Commission, Jiading District Government and Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. It is a R&D and transformation functional platform integrating R&D, engineering, industrialization and cultivation, providing in-depth process technology support and services for innovative enterprises and partners. SITRI was established under the guidance of Shanghai Lianhe Investment Co., Ltd.’s strategic mission of serving the national strategy and being a pioneer in scientific and technological development. It relies on the “three-in-one” innovation architecture model of Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. With the support of the technical strength of Shanghai Institute of Microsystem and the investment and operation model of Shanghai Xinwei Technology Group, it has established close cooperative relations with many domestic and foreign production, learning and research organizations, realized the efficient industrialization of innovative achievements, and accelerated the establishment of the “More than Moore” industrial ecosystem.
· SITRI has the first 8-inch “More than Moore” R&D pilot line in China, providing “More than Moore” core process technologies such as MEMS, silicon photonics, and biochips, and providing efficient R&D, pilot and verification services for semiconductor companies such as design, equipment and materials, realizing seamless connection from R&D to small batch production.
· Up to now, SITRI has applied for 877 patents, 697 invention patents, including 56 PCT (international patent) patents. · SITRI is based in Shanghai, facing the Yangtze River Delta, and radiating across the country, and has initially formed an industrial ecosystem in the field of “More Than Moore”.
Partner
Accretech Malaysia
Tokyo Seimitsu Co Ltd or better known as Accretech has been a pioneer in both the nanometre precision sector of industrial measuring technology and also in the fascinating area of semiconductor equipment technology since its inception in 1949. The word Accrete is hidden in ACCRETECH, which means: Using synergies, combining power, finding solutions together, offering the best support for the best products, growing closer and growing together. The name is our driving force for new pioneering technologies in both fields.
Products & Services
Accretech is offering solutions ranging from CmP’s, wafer probers, wafer grinders and wafer dicing solutions. All our products and solutions are compatible to 300mm form factor to cater to high volume manufacturing demands. ACCRETECH offers you ultra-modern machines and systems which you can use to manufacture precisely the types of wafers required in the semiconductor industry complete with state of the art automation systems, compatible with OHT, AGV and networking demands. We see ourselves not only as a developer and manufacturer, but also as a service provider and partner
Partner
AP&S International
For over 20 years, we have been supplying high-performance wet process equipment for the surface treatment of wafers to the world’s leading semiconductor manufacturers. Our modular product range is perfectly tailored to the needs of the semiconductor industry, whether standard wet process equipment or a customized solution is required.
Chemical wet processes are our passion. As a leading supplier for the semiconductor, MEMS and microelectronics industry, we offer wet process equipment for batch and single wafer processes as well as process supporting equipment!
Far-sighted, customer-oriented, innovative and committed to continuous progress – this is AP&S and its wet process equipment. At home in the semiconductor industry worldwide, we help shape the future of semiconductor production!
Products & Services
Efficient wet process solutions for your semiconductor production. Whether you need a standard system or a customized wet process solution: Our modular product range is perfectly tailored to your needs!
AP&S offers the complete range of wet process equipment from single wafer systems to wet benches for batch processes as well as fab logistics equipment.
The AP&S product range includes manual, semi-automatic and fully automatic wet process solutions for the semiconductor, MEMS and microstructuring industries as well as for the R&D sector. Among others, AP&S equipment covers the following wet processes: cleaning, etching, metal etching, PR stripping, electroless metal deposition, lift-off process, drying, developing and others.
We offer wet process equipment for batch processes as well as for single wafer processing and equipment for ensuring cleanliness and maximum productivity in semiconductor production such as FOUP, SMIF and box cleaners as well as various chemical management systems. AP&S equipment is used in front-end-of-line (FEOL) and back-end-of-line (BEOL) processes.
Partner
Delta Electronics Int’l (Singapore)
Delta, established in 1971, is a global leader in switching power supplies and thermal management products. The company offers a diverse portfolio of energy-efficient solutions in industrial automation, building automation, telecom power, data center infrastructure, EV charging, renewable energy, energy storage, and display technologies, all aimed at fostering smart manufacturing and sustainable urban development.
Since 2011, Delta has been listed on the DJSI World Index of Dow Jones Sustainability™ Indices for 13 consecutive years. It has also received the CDP double A List three times for its significant contributions to climate change and water security, and has been named a Supplier Engagement Leader for seven years running. Guided by its mission “To provide innovative, clean, and energy-efficient solutions for a better tomorrow,” Delta uses its expertise in high-efficiency power electronics and an ESG-focused approach to tackle key environmental challenges. The company serves its customers through a network of sales offices, R&D centers, and manufacturing facilities in nearly 200 locations across five continents.
Partner
Exyte
Exyte is a global leader in design, engineering and delivery of facilities for high-tech industries. With a history of more than 100 years, the company has developed a unique expertise in cleanroom and related manufacturing technology.
Operating in over 20 countries and with around 9,900 talented employees across 80 nationalities worldwide, Exyte is serving the most technically demanding markets such as semiconductors, batteries, pharmaceuticals, biotechnology, and data centers. Exyte offers a full range of services globally from consulting to managing the implementation of turnkey solutions with the highest standards in safety and quality.
Exyte serves industry leaders determining the future of technology through world-class solutions to accelerate their sustainable growth and overcome future challenges.
With our global supply chain network, in-house technology prowess and experienced engineering and project execution teams, we deliver Certainty in schedule, cost and quality to our clients while addressing the need to reduce environmental impacts
Products & Services
Exyte’s Advanced Technology Facilities (ATF) business segment provides consulting and planning services, engineering and design services, as well as project management services surrounding the building of semiconductor fabs and their related installations for manufacturing, research and development.
We combine our range of services to provide turnkey engineering, procurement, and implementation solutions (Design & Build). Additionally, We offer services in the area of mechanical, electrical, and process systems (MEP), provides cleanroom technology, as well as necessary gas and chemical dosing systems, and carries out the installation (Tool Install) of the process equipment used for semiconductor manufacturing purposes.
The integration of the Critical Process Systems Group (CPS), Airgard, and Intega within the Exyte Group has expanded the range of products and services offered to microelectronic clients. The range offered encompasses innovative, critical subsystems, such as precision chemical and gas mixing systems, distribution and delivery systems, and special exhaust gas cleaning systems that enable chip manufacturers to significantly reduce their greenhouse gas emissions.
Our extensive experience in delivering sophisticated high-tech facilities, by means of its integrated design and build approach, provides our clients with the reliability they expect in terms of safety, costs, timelines, and quality.
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