27-28 August 2025
Suwon
Whether your production line is facing a shutdown, or your high-value equipment is waiting for a new component, you can’t afford a shipping delay. From life-saving organs to essential machinery components, Airspace is trusted by the world’s largest companies and most critical organizations to move their top time-sensitive shipments on time, every time.
Airspace’s proprietary AI-powered platform is the most advanced of its kind- awarded and protected by multiple patents, it provides speed, reliability, routing, tracking visibility and transparency unrivaled in time-critical logistics. It powers a 24/7/365 pro-active expert support team that understands the needs of vertical specific shipments such as those in the semiconductor business.
With offices in the United States in Southern California, Dallas, and in Europe in Amsterdam and new offices in Frankfurt, Stockholm, and Paris, London, Porto, Airspace is rapidly scaling into new markets and industries while continuing to innovate and maximize value for its customers. Backed by leading investors including Telstra, HarbourVest, Prologis, Qualcomm, Defy, and others, Airspace has raised $70M to date.
Whether your production line is facing a shutdown, or your high-value equipment is waiting for a new component, you can’t afford a shipping delay.
Airspace’s proprietary AI-powered platform is the most advanced of its kind- awarded and protected by multiple patents, it provides speed, reliability, routing and transparency unrivaled in time-critical logistics. It powers a 24/7/365 pro-active expert team that understands the specific needs of shipments such as those in the semiconductor business.
From NFO, to OBC, dedicated drives, charters and more, the Airspace technology will calculate the best routing for you, taking your specific requirements into consideration as well as automating the process to save your team valuable time.
Your supply chain is complicated — we make it easy for you.
THE SPECIALIST FOR CHARACTERIZING PIEZOELECTRIC MATERIALS AND DEVICES FOR PRODUCTION AND RESEARCH
When others say it cannot be done, we go ahead and do it. With a combination of experience and a passion for innovation, we have been developing modular measurement systems for characterizing piezoelectric materials and designing integrated system solutions since 1995, always with the needs of our customers in mind.
Our goal: reliable tools, tailored precisely to the respective needs.
We offer our customers unique tools based on own modules and components from our partners that have proven themselves for years.
Combining system integration with automation
We have an experienced team of physicists, engineers, electricians and programmers that combines tried-and-tested modules and components with new developments like suitable sample fixtures. This lets us deliver guaranteed quality to customers like you in the shape of our highly reliable testing and production tools, with short run-up times.
We will always take the latest expert insights into account when designing and producing our systems. Although we always tailor our tools precisely to customer needs, several systems have become established. Two examples of our systems:
aixDBLI Industrial Line
– Only commercial system that allows quality control of the clamped film before further processing for process qualification
– Wafer mapping enables homogeneity testing
– Unique resolution of over 0,5 pm
– Monitoring of other characteristic values, such as breakdown voltage, leakage current, epsilon and loss factor
ScanningHALT
– Fast, automated measurement of a range of samples -> get a high-quality statistical database quicker, e.g. for aging estimations
– Systems are flexible and easy to adapt to your specific requirements
– Measurement support throughout the entire development and production phases
Maybe one of them is the solution you have been looking for. If not, do not hesitate to get in touch!
Evatec delivers complete thin film deposition solutions in Advanced Packaging, Semiconductor, Optoelectronics and Photonics – from UBM /RDL processes in FOWLP and FOPLP applications, to deposition of high performance piezoelectrics like AlScN for 5G networks or NIR bandpass filters for 3D sensing, face and gesture recognition in our smart devices. We deliver tailored production solutions with batch, cluster or inline architecture according to your substrate format, throughput, process and fab integration requirements. Evatec’s Advanced Process Control (APC) technologies set new standards in deposition through ‘in situ” capability for control of film properties during the deposition cycle. Reduce your process development times, enhance repeatability and yields or increase tool throughput.
Green Technology Investments LLC (GTi), headquartered in Scottsdale, Arizona, is a pioneering force in the semiconductor industry. With a focus on innovative remanufacturing and software solutions, GTi aims to revolutionize how businesses access advanced technology. Since its inception, in 2012, GTi has been committed to providing high-quality equipment and expert services to its global clientele. With offices strategically located in North America, Europe, and Asia, GTi is well-positioned to meet the needs of customers worldwide. By investing in research and development, GTi continues to expand the capabilities of remanufactured equipment and software, making cutting-edge technology more accessible and affordable for businesses of all sizes. GTi’s impact on the semiconductor industry is profound, enabling businesses to compete effectively in today’s dynamic market landscape.
Green Technology Investments LLC (GTi) offers a comprehensive range of products and services tailored to the semiconductor industry’s evolving needs. Specializing in remanufacturing and software solutions, GTi provides access to advanced technology at a more affordable price point. Their product lineup includes remanufactured semiconductor equipment such as CD-SEM, DR-SEM metrology systems, and MASK systems, ensuring high-quality performance and significant cost savings compared to new systems. In addition to equipment, GTi offers ready-to-ship spare parts, expert service support, and foundry capabilities to enhance customer experience and satisfaction. With a relentless focus on innovation and customer satisfaction, GTi is dedicated to empowering businesses of all sizes with the tools they need to thrive in today’s competitive global market.
Siconnex is one of the leading suppliers of wet chemistry equipment for etch, clean, and resist strip applications. The company’s main headquarters and production facilities are located in Austria, with additional sites in America, Japan, Malaysia, Singapore, and France. Overall, Siconnex operates in eight locations worldwide.
With over 20 years of experience, Siconnex has fully dedicated its efforts to perfecting batch spray technology—the core technology known as BATCHSPRAY®. This technology exemplifies our commitment to reducing environmental impact while maintaining high performance and efficiency.
We believe that sustainability and technological progress go hand in hand, and we combine them in our systems. As a hidden champion, we perform essential work for technology-leading companies and have a significant impact on microchip production worldwide.
Our systems feature a reduced footprint and are therefore chosen by our customers as a space-saving alternative. To ensure the highest possible safety for the operator, our systems are completely closed to avoid direct contact with chemicals. The combination of several processes and the optimized wafer flows is another major benefit.
Environmental protection through sustainable processes
Due to high savings in water and chemicals, our products are cost-efficient and environment friendly. Two of our greatest process advantages are shown by the following comparative examples.
METAL ETCH PROCESS
Three conventional dry etch systems can be replaced by our Acid Autoload system.
CLEAN PROCESS
A conventional cleaning system can be replaced by our Clean Autoload system.
ULVAC GmbH which was established in 1987 as the European subsidiary of ULVAC, Inc. headquartered in Munich, Germany. ULVAC’s solutions diversely incorporate equipment, materials, and services for Semiconductors, MEMS, Flat Panel Displays, Electronic Components, PCB, TFB, and other Vacuum Equipment for the European Markets.
ULVAC is the global leader for thin film PZT deposition and etch.
ULVAC GmbH
Klausnerring 4
85551 Kirchheim b. München
Germany
Fon: +49 – 89 – 96 09 09 – 0
Fax: +49 – 89 – 96 09 09 – 96
Email: ulvac@ulvac.de
http://www.ulvac.eu
For MEMS application ULVAC has developed systems dedicated to MEMS sensors, actuators, switches, lab-on-chip and micromirror manufacturing. This equipment range includes sputtering and etching for piezo electric materials like PZT, AlN and ScAlN, glass and metal etching, thick resist ashing, resist and polymer removal within trench structures, and others.
Piezoelectric materials can be used to further miniaturize a range of devices, including inertial sensors, tuneable RF devices, inkjet print heads, micromirrors, microphones, autofocus lenses and others. The integration of thin film deposition directly on CMOS-processed wafers is key for highly-integrated devices. ULVAC has developed high-volume processing sputtering method that allows sub 500°C processing temperatures, is configured to pole the piezoelectric crystals during the deposition process and is compatible with other CMOS processes.
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