27-28 August 2025
Suwon
16:30 – 16:40
Enabling Metrology, Inspection and Lithography Technologies for AI and HPC Packaging
The increasing demand for advanced applications such as artificial intelligence (AI) and high-performance computing (HPC) has driven the greater adoption of the heterogeneous integration of chiplets into advanced packaging technologies. To optimize power, performance, area, and cost for specific applications, integration is pursued at both wafer and panel levels. In this presentation we will discuss key integration technology trends and examine how Onto Innovation’s comprehensive product portfolio addresses these high-value challenges.
Monita Pau, Ph.D.
Onto Innovation
Monita Pau is currently Strategic Marketing Director for Advanced Packaging at Onto Innovation. She works with business leaders and executives to drive strategic planning and leads the development of collaborative initiatives to drive growth and innovation. With over 15 years of experience, her expertise spans across frontend and backend of line process control solutions as well as specialty materials for advanced packaging and assembly. Prior to joining Onto, she held various positions in applications engineering, marketing and strategic business development at DuPont and KLA. Monita holds a Ph.D. degree in Chemistry from Stanford University.
Company Profile
Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; elemental layer composition; overlay metrology; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization.
General Telephone: +1 978 253 6200
General email: info@ontoinnovation.com
Website: www.ontoinnovation.com