• 16:30 – 16:40

Enabling Metrology, Inspection and Lithography Technologies for AI and HPC Packaging

The increasing demand for advanced applications such as artificial intelligence (AI) and high-performance computing (HPC) has driven the greater adoption of the heterogeneous integration of chiplets into advanced packaging technologies. To optimize power, performance, area, and cost for specific applications, integration is pursued at both wafer and panel levels. In this presentation we will discuss key integration technology trends and examine how Onto Innovation’s comprehensive product portfolio addresses these high-value challenges.

Dr. Monita Pau photo

Dr. Monita Pau

Strategic Marketing Director for Advanced Packaging

Onto Innovation

Dr. Monita Pau is Strategic Marketing Director for Advanced Packaging at Onto Innovation. Prior to joining Onto, she held various application engineering, marketing and strategic business development roles at DuPont and KLA. Her expertise spans across FOEL/BEOL process control solutions as well as advanced packaging and assembly materials serving both core and specialty semiconductor markets. Dr. Pau holds a Ph.D. degree in Chemistry from Stanford University.

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Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; elemental layer composition; overlay metrology; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization.

General Telephone: +1 978 253 6200
General email: info@ontoinnovation.com
Website: www.ontoinnovation.com

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