• 16:35 – 16:40

Enabling Solutions For Advanced Power Device Fabrication

Advanced power semiconductors and PMICs are key enabling technologies in automotive, consumer and wireless communications.

Si power semiconductors continue to evolve and are becoming increasingly sophisticated in order to deliver performance improvements. These trends are also driving the need for more advanced high volume manufacturing solutions. 300mm production, ultra-thin wafer processing, higher density device architecture and more complex vertical trench designs all pose new challenges from a fabrication perspective. At the same time, new generations of wide bandgap power devices that complement established Si based technologies are increasingly being deployed.

Lam is partnering with our customers and research partners to continually innovate in these fields in order to offer market leading etch, deposition and clean solutions for advanced and next generation power device manufacturing.

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Dr. Anna Battaglia photo

Dr. Anna Battaglia

Technology Manager

Lam Research Corporation

Dr. Anna Battaglia graduated in Physics from the University of Catania in 1989 and completed her PhD in Physics in 1993, working on material modification induced by ion implantation.

In 1994 she joined the semiconductor capital equipment industry working as a technologist for different products and applications (Etch, Deposition, Clean) and gained more than 25 years of experience in semiconductor technology. In 2010, Anna joined Enel Green Power, an Italian multinational renewable energy corporation, as R&D Manager on advanced solar cell development and manufacturing, expanding her knowledge in the field of renewable energy and becoming technical coordinator of multiple European and Italian projects. In 2018 Anna joined Lam Research as Technology Manager supporting European business with particular focus on Specialty Technologies (MEMS, Discrete Power, BCD, CIS). Anna is also author of several publications and patents in the field of microelectronics and solar cell development.


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Lam Research Corporation is a trusted global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. Our strong values-based culture fuels our progress, and it’s through collaboration, precision, and delivery that we are driving semiconductor breakthroughs that define the next generation. Lam Research (Nasdaq: LRCX) is a FORTUNE 500® company headquartered in Fremont, California, with operations around the globe. Learn more at www.lamresearch.com

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