08:55 – 09:15

Keynote

MEMS inertial sensors for navigation applications

Northrop Grumman LITEF started the development of micro-electromechanical systems (MEMS) gyroscope chips with Deep Reactive Ion Etching (DRIE) in 2003. Based on this technology, a six degree of freedom MEMS IMU was developed for navigation applications. After successful transfer from early MEMS IMU prototypes to series production, NG LITEFs IMU is available since many years with a specified bias error of 4 deg/h and an angular random walk (ARW) of 0.15 deg/sqrt(h) over temperature. Recently an European Technical Standard Order (ETSO) for the MEMS based Attitude Heading Reference System (AHRS) LCR-350B was received, so that NG LITEF is able to supply the first purely MEMS based AHRS worldwide to the avionic helicopter and fixed-wing market. Next generation avionic systems require even higher performing MEMS sensors. Northrop Grumman LITEF is addressing these needs with the next generation MEMS sensors.

Stefan Rombach

Head of MEMS

Northrop Grumman LITEF GmbH