• 16:05 – 16:25

From Concept to Application: INL’s Breakthroughs in MEMS Technology

The International Iberian Nanotechnology Laboratory (INL) is a research centre equipped with state-of-the-art microfabrication and characterization facilities. Aiming to be a global leader in nanotechnology innovation, INL focuses on strategic research areas, with MEMS as a crucial enabling technology. In this presentation, Dr. Filipe Alves, a Staff Researcher in the Integrated Micro and Nanotechnology Research Group, will highlight some of the key contributions in MEMS technology. Topics will include high-resolution inertial sensors for space gravimetry, multi-mass devices with 3-axis sensitivity, and an all-silicon, multispot 2D MEMS mirror.

Filipe Alves

Staff Researcher

INL (International Iberian Nanotechnology Laboratory)

Dr. Filipe Serra Alves is currently a Staff Researcher within the Integrated Micro and Nanotechnologies Research Group at INL – International Iberian Nanotechnology Laboratory, Portugal. His research is focused on the development of new integrated systems that range from the design and fabrication of MEMS devices, to the instrumentation and control electronics, both at the discrete and integrated level.He obtained his PhD in microelectronics in 2017, specializing in pull-in based MEMS inclinometers with integrated mixed-signal electronics, from the University of Minho, Portugal, in collaboration with the Delft University of Technology, The Netherlands. Prior to joining INL as a Research Fellow, he served as an assistant professor in the Industrial Electronics Department at the University of Minho. Recently, he has been working in new sensor concepts, including polyimide-based flexible devices and high-resolution MEMS inertial sensors, with a particular interest in FPGA and ASIC-based high-performance digital systems. As a principal investigator, he has coordinated several research projects targeting new transduction mechanisms and working principles, aiming to push the boundaries of MEMS technology. Dr. Alves has authored numerous high-impact publications and serves as a reviewer for top-tier journals in the field, including IEEE Sensors Journal, Journal of Microelectromechanical Systems, Sensors and Actuators A: Physical or Nature Scientific Reports.

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The International Iberian Nanotechnology Laboratory is one of the main international research centres dedicated to nanoscience.

The Laboratory is an intergovernmental organization founded in 2005 upon a joint agreement between Portugal and Spain. Today, it houses a multicultural community of more than 400 researchers from 30 nationalities with various scientific backgrounds. Headquartered in Braga, northern Portugal, INL focuses on strategic research areas that deepen our understanding of fundamental phenomena, serving as the basis for the development of innovative technologies.
Key areas include clean water, clean energy, zero hunger, good health, and overall well-being. INL’s mission is two-fold: to carry out excellent research in nanotechnology, and to engage with society by means of technology transfer and public outreach. This twin approach guides the organisation to navigate the unknown universe of science, and to identify new research areas at the intersection of established knowledge fields. The overarching objective is to advance research anchored in nanotechnology towards new science and novel methodologies, and to devise nanotechnology-based solutions, in the physical and human environments, mediated by cutting-edge research in information and communication technologies.

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