The global demand for high-end computing power driven by smartphones, IoT applications, High-performance computing, and new mobility applications is constantly rising while facing miniaturization demands. The semiconductor industry is all about identifying and solving these challenges and thereby, yield and process control is core for foundries and its importance increased even more through the introduction of advanced packaging. In today’s environment, two things can be observed. One, prototyping and verification costs exponentially increase while node sizes decrease. Two, a change from typical inspection methods like optical or FIB-SEM to advanced non-destructive inspection techniques like X-ray inspection. Ultimately advanced packaging companies seek non-destructive automated inspection tools which are fast enough to provide value within their production processes, increase yield and reduce waste at an early stage. This presentation will give an overview on how X-Ray and CT inspection can provide value-added data and information for exactly that.