Commercialization of MEMS-based ultrasonics

ISES Docs:

Over the last 10 years, my group has developed and commercialized PMUT-based systems for consumer electronics applications, starting with air-coupled PMUTs used for time-of-flight (ToF) range-finding and human presence sensing. These ToF sensors were commercialized by my startup, Chirp Microsystems (now part of TDK), and are used in many products such as smart-locks, robot vacuum cleaners, and laptops. We subsequently developed an ultrasonic fingerprint sensor based on the monolithic integration of PMUTs with CMOS that is used for biometric authentication.

David Horsley, Ph.D.

Professor

Northeastern University

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