R&D pilot platforms are essential for advancing MEMS and silicon photonics, providing the foundation for transforming research breakthroughs into manufacturable technologies. SITRI has built China’s first open 8-inch “More-than Moore” platform dedicated to MEMS and silicon photonics development. It supports the entire innovation chain from design and process development to pilot production, mass production, testing and packaging—enabling rapid prototyping and industrial scaling. SITRI also fosters an innovation ecosystem that connects industry, academia, and research. Through joint development projects, shared facilities, and incubation programs, it accelerates technology transfer and the commercialization of emerging microsystems. By combining strong process capabilities with collaborative innovation, SITRI has become a key enabler of industrial transformation in MEMS and silicon photonics, strengthening the foundation for next-generation intelligent sensing and optical interconnection technologies.