Testing processes have a relevant impact on the semiconductor manufacturing effectiveness and, at the end, on the final product cost. This is especially true when we talk about MEMS devices, due to the fact that test equipment for MEMS is strongly application-dependent and scarcely reusable for different devices. For many years, both MEMS manufacturers and ATE/Handler suppliers have developed specific test equipment and instruments for every different type of MEMS.

However, having a completely different machine for each different product is becoming less and less efficient, as the number of devices increases exponentially. More and more companies are recognizing the need for a testing and handling solution that is suitable for the requirements of high-volume production lines, scalable, and convertible for different application technologies.

A standard test setup for MEMS includes a handler, test resources, and an interchangeable test unit able to stimulate the devices during the execution of the electrical test. The same test cell can accommodate the test units for testing different products, such as pressure sensors, accelerometer, gyroscopes, microphones, magnetic sensors, and many others.

The presentation explores the new opportunities offered by this integrated approach, focusing on the advantages – in terms of cost of test, performance and ROI. Specific application case studies will be presented, dedicated to inertial, pressure, and magnetic sensor testing.